9/4/2012	10:23:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	10:23:11 AM	Recipe started at 10:23 AM
9/4/2012	10:23:11 AM	Helium valve closed
9/4/2012	10:23:11 AM	H2 valve closed
9/4/2012	10:23:11 AM	BCl3 valve closed
9/4/2012	10:23:11 AM	PH3 valve closed
9/4/2012	10:23:11 AM	SiCl4 pre valve closed
9/4/2012	10:23:11 AM	SiCl4 post valve closed
9/4/2012	10:23:11 AM	Main Vac valve closed
9/4/2012	10:23:11 AM	Bypass valve closed
9/4/2012	10:23:11 AM	Bubbler valve closed
9/4/2012	10:23:11 AM	Helium MFC set to  0.000000
9/4/2012	10:23:11 AM	H2 MFC set to  0.000000
9/4/2012	10:23:11 AM	BCl3 MFC set to  0.000000
9/4/2012	10:23:11 AM	PH3 MFC set to  0.000000
9/4/2012	10:23:11 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:23:11 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:23:11 AM	Tube furnace set to 0
9/4/2012	10:23:14 AM	H2 valve closed
9/4/2012	10:23:14 AM	BCl3 valve closed
9/4/2012	10:23:14 AM	PH3 valve closed
9/4/2012	10:23:14 AM	SiCl4 pre valve closed
9/4/2012	10:23:14 AM	SiCl4 post valve closed
9/4/2012	10:23:14 AM	Main Vac valve closed
9/4/2012	10:23:14 AM	Bypass valve closed
9/4/2012	10:23:14 AM	Bubbler valve closed
9/4/2012	10:23:15 AM	Helium valve opened
9/4/2012	10:23:15 AM	Helium MFC set to  500.000000
9/4/2012	10:23:15 AM	H2 MFC set to  0.000000
9/4/2012	10:23:15 AM	BCl3 MFC set to  0.000000
9/4/2012	10:23:15 AM	PH3 MFC set to  0.000000
9/4/2012	10:23:15 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:23:15 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:23:15 AM	Tube furnace set to 0
9/4/2012	10:24:27 AM	Helium valve closed
9/4/2012	10:24:27 AM	H2 valve closed
9/4/2012	10:24:27 AM	BCl3 valve closed
9/4/2012	10:24:27 AM	PH3 valve closed
9/4/2012	10:24:27 AM	SiCl4 pre valve closed
9/4/2012	10:24:27 AM	SiCl4 post valve closed
9/4/2012	10:24:27 AM	Main Vac valve closed
9/4/2012	10:24:27 AM	Bypass valve closed
9/4/2012	10:24:27 AM	Bubbler valve closed
9/4/2012	10:24:27 AM	Helium MFC set to  0.000000
9/4/2012	10:24:27 AM	H2 MFC set to  0.000000
9/4/2012	10:24:27 AM	BCl3 MFC set to  0.000000
9/4/2012	10:24:27 AM	PH3 MFC set to  0.000000
9/4/2012	10:24:27 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:24:27 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:24:27 AM	Tube furnace set to 0
9/4/2012	10:24:28 AM	Run finished at 10:24 AM
9/4/2012	10:24:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	10:27:35 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	10:27:36 AM	Recipe started at 10:27 AM
9/4/2012	10:27:36 AM	Helium valve closed
9/4/2012	10:27:36 AM	H2 valve closed
9/4/2012	10:27:36 AM	BCl3 valve closed
9/4/2012	10:27:36 AM	PH3 valve closed
9/4/2012	10:27:36 AM	SiCl4 pre valve closed
9/4/2012	10:27:36 AM	SiCl4 post valve closed
9/4/2012	10:27:36 AM	Main Vac valve closed
9/4/2012	10:27:36 AM	Bubbler valve closed
9/4/2012	10:27:36 AM	Bypass valve opened
9/4/2012	10:27:36 AM	Helium MFC set to  0.000000
9/4/2012	10:27:36 AM	H2 MFC set to  0.000000
9/4/2012	10:27:36 AM	BCl3 MFC set to  0.000000
9/4/2012	10:27:36 AM	PH3 MFC set to  0.000000
9/4/2012	10:27:36 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:27:36 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:27:37 AM	Tube furnace set to 0
9/4/2012	10:28:49 AM	Helium valve closed
9/4/2012	10:28:49 AM	H2 valve closed
9/4/2012	10:28:49 AM	BCl3 valve closed
9/4/2012	10:28:49 AM	PH3 valve closed
9/4/2012	10:28:49 AM	SiCl4 pre valve closed
9/4/2012	10:28:49 AM	SiCl4 post valve closed
9/4/2012	10:28:49 AM	Main Vac valve closed
9/4/2012	10:28:49 AM	Bubbler valve closed
9/4/2012	10:28:49 AM	Bypass valve opened
9/4/2012	10:28:49 AM	Helium MFC set to  0.000000
9/4/2012	10:28:49 AM	H2 MFC set to  0.000000
9/4/2012	10:28:49 AM	BCl3 MFC set to  0.000000
9/4/2012	10:28:49 AM	PH3 MFC set to  0.000000
9/4/2012	10:28:49 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:28:49 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:28:49 AM	Tube furnace set to 0
9/4/2012	10:29:40 AM	Helium valve closed
9/4/2012	10:29:40 AM	H2 valve closed
9/4/2012	10:29:40 AM	BCl3 valve closed
9/4/2012	10:29:40 AM	PH3 valve closed
9/4/2012	10:29:40 AM	SiCl4 pre valve closed
9/4/2012	10:29:40 AM	SiCl4 post valve closed
9/4/2012	10:29:40 AM	Bypass valve closed
9/4/2012	10:29:40 AM	Bubbler valve closed
9/4/2012	10:29:40 AM	Main Vac valve opened
9/4/2012	10:29:40 AM	Helium MFC set to  0.000000
9/4/2012	10:29:40 AM	H2 MFC set to  0.000000
9/4/2012	10:29:40 AM	BCl3 MFC set to  0.000000
9/4/2012	10:29:40 AM	PH3 MFC set to  0.000000
9/4/2012	10:29:40 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:29:40 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:29:41 AM	Tube furnace set to 0
9/4/2012	10:29:42 AM	Run finished at 10:29 AM
9/4/2012	10:29:42 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	10:30:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	10:30:49 AM	Recipe started at 10:30 AM
9/4/2012	10:30:49 AM	Helium valve closed
9/4/2012	10:30:49 AM	H2 valve closed
9/4/2012	10:30:49 AM	BCl3 valve closed
9/4/2012	10:30:49 AM	PH3 valve closed
9/4/2012	10:30:49 AM	SiCl4 pre valve closed
9/4/2012	10:30:49 AM	SiCl4 post valve closed
9/4/2012	10:30:49 AM	Main Vac valve closed
9/4/2012	10:30:49 AM	Bypass valve closed
9/4/2012	10:30:49 AM	Bubbler valve closed
9/4/2012	10:30:49 AM	Helium MFC set to  0.000000
9/4/2012	10:30:49 AM	H2 MFC set to  0.000000
9/4/2012	10:30:49 AM	BCl3 MFC set to  0.000000
9/4/2012	10:30:49 AM	PH3 MFC set to  0.000000
9/4/2012	10:30:49 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:30:49 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:30:49 AM	Tube furnace set to 0
9/4/2012	10:30:52 AM	H2 valve closed
9/4/2012	10:30:52 AM	BCl3 valve closed
9/4/2012	10:30:52 AM	PH3 valve closed
9/4/2012	10:30:52 AM	SiCl4 pre valve closed
9/4/2012	10:30:52 AM	SiCl4 post valve closed
9/4/2012	10:30:52 AM	Main Vac valve closed
9/4/2012	10:30:52 AM	Bypass valve closed
9/4/2012	10:30:52 AM	Bubbler valve closed
9/4/2012	10:30:52 AM	Helium valve opened
9/4/2012	10:30:52 AM	Helium MFC set to  500.000000
9/4/2012	10:30:52 AM	H2 MFC set to  0.000000
9/4/2012	10:30:52 AM	BCl3 MFC set to  0.000000
9/4/2012	10:30:52 AM	PH3 MFC set to  0.000000
9/4/2012	10:30:52 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:30:52 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:30:52 AM	Tube furnace set to 0
9/4/2012	10:32:06 AM	Helium valve closed
9/4/2012	10:32:06 AM	H2 valve closed
9/4/2012	10:32:06 AM	BCl3 valve closed
9/4/2012	10:32:06 AM	PH3 valve closed
9/4/2012	10:32:06 AM	SiCl4 pre valve closed
9/4/2012	10:32:06 AM	SiCl4 post valve closed
9/4/2012	10:32:06 AM	Main Vac valve closed
9/4/2012	10:32:06 AM	Bypass valve closed
9/4/2012	10:32:06 AM	Bubbler valve closed
9/4/2012	10:32:06 AM	Helium MFC set to  0.000000
9/4/2012	10:32:06 AM	H2 MFC set to  0.000000
9/4/2012	10:32:06 AM	BCl3 MFC set to  0.000000
9/4/2012	10:32:06 AM	PH3 MFC set to  0.000000
9/4/2012	10:32:06 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:32:06 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:32:06 AM	Tube furnace set to 0
9/4/2012	10:32:07 AM	Run finished at 10:32 AM
9/4/2012	10:32:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	10:34:58 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	10:34:59 AM	Recipe started at 10:34 AM
9/4/2012	10:34:59 AM	Helium valve closed
9/4/2012	10:34:59 AM	H2 valve closed
9/4/2012	10:34:59 AM	BCl3 valve closed
9/4/2012	10:34:59 AM	PH3 valve closed
9/4/2012	10:34:59 AM	SiCl4 pre valve closed
9/4/2012	10:34:59 AM	SiCl4 post valve closed
9/4/2012	10:34:59 AM	Main Vac valve closed
9/4/2012	10:34:59 AM	Bubbler valve closed
9/4/2012	10:34:59 AM	Bypass valve opened
9/4/2012	10:34:59 AM	Helium MFC set to  0.000000
9/4/2012	10:34:59 AM	H2 MFC set to  0.000000
9/4/2012	10:34:59 AM	BCl3 MFC set to  0.000000
9/4/2012	10:34:59 AM	PH3 MFC set to  0.000000
9/4/2012	10:34:59 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:34:59 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:34:59 AM	Tube furnace set to 0
9/4/2012	10:36:14 AM	Helium valve closed
9/4/2012	10:36:14 AM	H2 valve closed
9/4/2012	10:36:14 AM	BCl3 valve closed
9/4/2012	10:36:14 AM	PH3 valve closed
9/4/2012	10:36:14 AM	SiCl4 pre valve closed
9/4/2012	10:36:14 AM	SiCl4 post valve closed
9/4/2012	10:36:14 AM	Main Vac valve closed
9/4/2012	10:36:14 AM	Bubbler valve closed
9/4/2012	10:36:14 AM	Bypass valve opened
9/4/2012	10:36:14 AM	Helium MFC set to  0.000000
9/4/2012	10:36:14 AM	H2 MFC set to  0.000000
9/4/2012	10:36:14 AM	BCl3 MFC set to  0.000000
9/4/2012	10:36:14 AM	PH3 MFC set to  0.000000
9/4/2012	10:36:14 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:36:14 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:36:14 AM	Tube furnace set to 0
9/4/2012	10:37:14 AM	Helium valve closed
9/4/2012	10:37:14 AM	H2 valve closed
9/4/2012	10:37:14 AM	BCl3 valve closed
9/4/2012	10:37:14 AM	PH3 valve closed
9/4/2012	10:37:14 AM	SiCl4 pre valve closed
9/4/2012	10:37:14 AM	SiCl4 post valve closed
9/4/2012	10:37:14 AM	Bypass valve closed
9/4/2012	10:37:14 AM	Bubbler valve closed
9/4/2012	10:37:14 AM	Main Vac valve opened
9/4/2012	10:37:14 AM	Helium MFC set to  0.000000
9/4/2012	10:37:14 AM	H2 MFC set to  0.000000
9/4/2012	10:37:14 AM	BCl3 MFC set to  0.000000
9/4/2012	10:37:14 AM	PH3 MFC set to  0.000000
9/4/2012	10:37:14 AM	SiCl4 MFC set to  0.000000
9/4/2012	10:37:14 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	10:37:14 AM	Tube furnace set to 0
9/4/2012	10:37:15 AM	Run finished at 10:37 AM
9/4/2012	10:37:15 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	10:59:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	11:00:01 AM	Recipe started at 10:59 AM
9/4/2012	11:00:01 AM	Helium valve closed
9/4/2012	11:00:01 AM	H2 valve closed
9/4/2012	11:00:01 AM	BCl3 valve closed
9/4/2012	11:00:01 AM	PH3 valve closed
9/4/2012	11:00:01 AM	SiCl4 pre valve closed
9/4/2012	11:00:01 AM	SiCl4 post valve closed
9/4/2012	11:00:01 AM	Main Vac valve closed
9/4/2012	11:00:01 AM	Bubbler valve closed
9/4/2012	11:00:01 AM	Bypass valve opened
9/4/2012	11:00:01 AM	Helium MFC set to  0.000000
9/4/2012	11:00:01 AM	H2 MFC set to  0.000000
9/4/2012	11:00:01 AM	BCl3 MFC set to  0.000000
9/4/2012	11:00:01 AM	PH3 MFC set to  0.000000
9/4/2012	11:00:01 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:00:01 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:00:01 AM	Tube furnace set to 0
9/4/2012	11:00:01 AM	Helium valve closed
9/4/2012	11:00:01 AM	H2 valve closed
9/4/2012	11:00:01 AM	BCl3 valve closed
9/4/2012	11:00:01 AM	PH3 valve closed
9/4/2012	11:00:01 AM	SiCl4 pre valve closed
9/4/2012	11:00:01 AM	SiCl4 post valve closed
9/4/2012	11:00:01 AM	Main Vac valve closed
9/4/2012	11:00:01 AM	Bubbler valve closed
9/4/2012	11:00:01 AM	Bypass valve opened
9/4/2012	11:00:01 AM	Helium MFC set to  0.000000
9/4/2012	11:00:01 AM	H2 MFC set to  0.000000
9/4/2012	11:00:01 AM	BCl3 MFC set to  0.000000
9/4/2012	11:00:01 AM	PH3 MFC set to  0.000000
9/4/2012	11:00:01 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:00:01 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:00:01 AM	Tube furnace set to 0
9/4/2012	11:00:03 AM	Helium valve closed
9/4/2012	11:00:03 AM	H2 valve closed
9/4/2012	11:00:03 AM	BCl3 valve closed
9/4/2012	11:00:03 AM	PH3 valve closed
9/4/2012	11:00:03 AM	SiCl4 pre valve closed
9/4/2012	11:00:03 AM	SiCl4 post valve closed
9/4/2012	11:00:03 AM	Bypass valve closed
9/4/2012	11:00:03 AM	Bubbler valve closed
9/4/2012	11:00:03 AM	Main Vac valve opened
9/4/2012	11:00:03 AM	Helium MFC set to  0.000000
9/4/2012	11:00:03 AM	H2 MFC set to  0.000000
9/4/2012	11:00:03 AM	BCl3 MFC set to  0.000000
9/4/2012	11:00:03 AM	PH3 MFC set to  0.000000
9/4/2012	11:00:03 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:00:03 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:00:03 AM	Tube furnace set to 0
9/4/2012	11:00:04 AM	H2 valve closed
9/4/2012	11:00:04 AM	BCl3 valve closed
9/4/2012	11:00:04 AM	PH3 valve closed
9/4/2012	11:00:04 AM	SiCl4 pre valve closed
9/4/2012	11:00:04 AM	SiCl4 post valve closed
9/4/2012	11:00:04 AM	Bypass valve closed
9/4/2012	11:00:04 AM	Bubbler valve closed
9/4/2012	11:00:04 AM	Helium valve opened
9/4/2012	11:00:04 AM	Main Vac valve opened
9/4/2012	11:00:04 AM	Helium MFC set to  20.000000
9/4/2012	11:00:04 AM	H2 MFC set to  0.000000
9/4/2012	11:00:04 AM	BCl3 MFC set to  0.000000
9/4/2012	11:00:04 AM	PH3 MFC set to  0.000000
9/4/2012	11:00:04 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:00:04 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:00:04 AM	Tube furnace set to 0
9/4/2012	11:00:34 AM	Helium valve closed
9/4/2012	11:00:34 AM	H2 valve closed
9/4/2012	11:00:34 AM	BCl3 valve closed
9/4/2012	11:00:34 AM	PH3 valve closed
9/4/2012	11:00:34 AM	SiCl4 pre valve closed
9/4/2012	11:00:34 AM	SiCl4 post valve closed
9/4/2012	11:00:34 AM	Bypass valve closed
9/4/2012	11:00:34 AM	Bubbler valve closed
9/4/2012	11:00:34 AM	Main Vac valve opened
9/4/2012	11:00:34 AM	Helium MFC set to  0.000000
9/4/2012	11:00:34 AM	H2 MFC set to  0.000000
9/4/2012	11:00:34 AM	BCl3 MFC set to  0.000000
9/4/2012	11:00:34 AM	PH3 MFC set to  0.000000
9/4/2012	11:00:34 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:00:34 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:00:34 AM	Tube furnace set to 0
9/4/2012	11:01:04 AM	H2 valve closed
9/4/2012	11:01:04 AM	BCl3 valve closed
9/4/2012	11:01:04 AM	PH3 valve closed
9/4/2012	11:01:04 AM	SiCl4 pre valve closed
9/4/2012	11:01:04 AM	SiCl4 post valve closed
9/4/2012	11:01:04 AM	Bypass valve closed
9/4/2012	11:01:04 AM	Bubbler valve closed
9/4/2012	11:01:04 AM	Helium valve opened
9/4/2012	11:01:04 AM	Main Vac valve opened
9/4/2012	11:01:04 AM	Helium MFC set to  20.000000
9/4/2012	11:01:04 AM	H2 MFC set to  0.000000
9/4/2012	11:01:04 AM	BCl3 MFC set to  0.000000
9/4/2012	11:01:04 AM	PH3 MFC set to  0.000000
9/4/2012	11:01:04 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:01:04 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:01:04 AM	Tube furnace set to 0
9/4/2012	11:01:34 AM	Helium valve closed
9/4/2012	11:01:34 AM	H2 valve closed
9/4/2012	11:01:34 AM	BCl3 valve closed
9/4/2012	11:01:34 AM	PH3 valve closed
9/4/2012	11:01:34 AM	SiCl4 pre valve closed
9/4/2012	11:01:34 AM	SiCl4 post valve closed
9/4/2012	11:01:34 AM	Bypass valve closed
9/4/2012	11:01:34 AM	Bubbler valve closed
9/4/2012	11:01:34 AM	Main Vac valve opened
9/4/2012	11:01:34 AM	Helium MFC set to  0.000000
9/4/2012	11:01:34 AM	H2 MFC set to  0.000000
9/4/2012	11:01:34 AM	BCl3 MFC set to  0.000000
9/4/2012	11:01:34 AM	PH3 MFC set to  0.000000
9/4/2012	11:01:34 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:01:34 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:01:35 AM	Tube furnace set to 0
9/4/2012	11:02:05 AM	H2 valve closed
9/4/2012	11:02:05 AM	BCl3 valve closed
9/4/2012	11:02:05 AM	PH3 valve closed
9/4/2012	11:02:05 AM	SiCl4 pre valve closed
9/4/2012	11:02:05 AM	SiCl4 post valve closed
9/4/2012	11:02:05 AM	Bypass valve closed
9/4/2012	11:02:05 AM	Bubbler valve closed
9/4/2012	11:02:05 AM	Helium valve opened
9/4/2012	11:02:05 AM	Main Vac valve opened
9/4/2012	11:02:05 AM	Helium MFC set to  20.000000
9/4/2012	11:02:05 AM	H2 MFC set to  0.000000
9/4/2012	11:02:05 AM	BCl3 MFC set to  0.000000
9/4/2012	11:02:05 AM	PH3 MFC set to  0.000000
9/4/2012	11:02:05 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:02:05 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:02:05 AM	Tube furnace set to 0
9/4/2012	11:02:35 AM	Helium valve closed
9/4/2012	11:02:35 AM	H2 valve closed
9/4/2012	11:02:35 AM	BCl3 valve closed
9/4/2012	11:02:35 AM	PH3 valve closed
9/4/2012	11:02:35 AM	SiCl4 pre valve closed
9/4/2012	11:02:35 AM	SiCl4 post valve closed
9/4/2012	11:02:35 AM	Bypass valve closed
9/4/2012	11:02:35 AM	Bubbler valve closed
9/4/2012	11:02:35 AM	Main Vac valve opened
9/4/2012	11:02:35 AM	Helium MFC set to  0.000000
9/4/2012	11:02:35 AM	H2 MFC set to  0.000000
9/4/2012	11:02:35 AM	BCl3 MFC set to  0.000000
9/4/2012	11:02:35 AM	PH3 MFC set to  0.000000
9/4/2012	11:02:35 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:02:35 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:02:35 AM	Tube furnace set to 0
9/4/2012	11:03:05 AM	H2 valve closed
9/4/2012	11:03:05 AM	BCl3 valve closed
9/4/2012	11:03:05 AM	PH3 valve closed
9/4/2012	11:03:05 AM	SiCl4 pre valve closed
9/4/2012	11:03:05 AM	SiCl4 post valve closed
9/4/2012	11:03:05 AM	Bypass valve closed
9/4/2012	11:03:05 AM	Bubbler valve closed
9/4/2012	11:03:05 AM	Helium valve opened
9/4/2012	11:03:05 AM	Main Vac valve opened
9/4/2012	11:03:05 AM	Helium MFC set to  20.000000
9/4/2012	11:03:05 AM	H2 MFC set to  0.000000
9/4/2012	11:03:05 AM	BCl3 MFC set to  0.000000
9/4/2012	11:03:05 AM	PH3 MFC set to  0.000000
9/4/2012	11:03:05 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:03:05 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:03:05 AM	Tube furnace set to 0
9/4/2012	11:03:35 AM	Helium valve closed
9/4/2012	11:03:35 AM	H2 valve closed
9/4/2012	11:03:35 AM	BCl3 valve closed
9/4/2012	11:03:35 AM	PH3 valve closed
9/4/2012	11:03:35 AM	SiCl4 pre valve closed
9/4/2012	11:03:35 AM	SiCl4 post valve closed
9/4/2012	11:03:35 AM	Bypass valve closed
9/4/2012	11:03:35 AM	Bubbler valve closed
9/4/2012	11:03:35 AM	Main Vac valve opened
9/4/2012	11:03:35 AM	Helium MFC set to  0.000000
9/4/2012	11:03:35 AM	H2 MFC set to  0.000000
9/4/2012	11:03:35 AM	BCl3 MFC set to  0.000000
9/4/2012	11:03:35 AM	PH3 MFC set to  0.000000
9/4/2012	11:03:35 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:03:35 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:03:35 AM	Tube furnace set to 0
9/4/2012	11:04:05 AM	H2 valve closed
9/4/2012	11:04:05 AM	BCl3 valve closed
9/4/2012	11:04:05 AM	PH3 valve closed
9/4/2012	11:04:05 AM	SiCl4 pre valve closed
9/4/2012	11:04:06 AM	SiCl4 post valve closed
9/4/2012	11:04:06 AM	Bypass valve closed
9/4/2012	11:04:06 AM	Bubbler valve closed
9/4/2012	11:04:06 AM	Helium valve opened
9/4/2012	11:04:06 AM	Main Vac valve opened
9/4/2012	11:04:06 AM	Helium MFC set to  20.000000
9/4/2012	11:04:06 AM	H2 MFC set to  0.000000
9/4/2012	11:04:06 AM	BCl3 MFC set to  0.000000
9/4/2012	11:04:06 AM	PH3 MFC set to  0.000000
9/4/2012	11:04:06 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:04:06 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:04:06 AM	Tube furnace set to 0
9/4/2012	11:04:36 AM	Helium valve closed
9/4/2012	11:04:36 AM	H2 valve closed
9/4/2012	11:04:36 AM	BCl3 valve closed
9/4/2012	11:04:36 AM	PH3 valve closed
9/4/2012	11:04:36 AM	SiCl4 pre valve closed
9/4/2012	11:04:36 AM	SiCl4 post valve closed
9/4/2012	11:04:36 AM	Bypass valve closed
9/4/2012	11:04:36 AM	Bubbler valve closed
9/4/2012	11:04:36 AM	Main Vac valve opened
9/4/2012	11:04:36 AM	Helium MFC set to  0.000000
9/4/2012	11:04:36 AM	H2 MFC set to  0.000000
9/4/2012	11:04:36 AM	BCl3 MFC set to  0.000000
9/4/2012	11:04:36 AM	PH3 MFC set to  0.000000
9/4/2012	11:04:36 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:04:36 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:04:36 AM	Tube furnace set to 0
9/4/2012	11:05:06 AM	H2 valve closed
9/4/2012	11:05:06 AM	BCl3 valve closed
9/4/2012	11:05:06 AM	PH3 valve closed
9/4/2012	11:05:06 AM	SiCl4 pre valve closed
9/4/2012	11:05:06 AM	SiCl4 post valve closed
9/4/2012	11:05:06 AM	Bypass valve closed
9/4/2012	11:05:06 AM	Bubbler valve closed
9/4/2012	11:05:06 AM	Helium valve opened
9/4/2012	11:05:06 AM	Main Vac valve opened
9/4/2012	11:05:06 AM	Helium MFC set to  20.000000
9/4/2012	11:05:06 AM	H2 MFC set to  0.000000
9/4/2012	11:05:06 AM	BCl3 MFC set to  0.000000
9/4/2012	11:05:06 AM	PH3 MFC set to  0.000000
9/4/2012	11:05:06 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:05:06 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:05:06 AM	Tube furnace set to 0
9/4/2012	11:05:36 AM	Helium valve closed
9/4/2012	11:05:36 AM	H2 valve closed
9/4/2012	11:05:36 AM	BCl3 valve closed
9/4/2012	11:05:36 AM	PH3 valve closed
9/4/2012	11:05:36 AM	SiCl4 pre valve closed
9/4/2012	11:05:36 AM	SiCl4 post valve closed
9/4/2012	11:05:36 AM	Bypass valve closed
9/4/2012	11:05:36 AM	Bubbler valve closed
9/4/2012	11:05:36 AM	Main Vac valve opened
9/4/2012	11:05:36 AM	Helium MFC set to  0.000000
9/4/2012	11:05:36 AM	H2 MFC set to  0.000000
9/4/2012	11:05:36 AM	BCl3 MFC set to  0.000000
9/4/2012	11:05:36 AM	PH3 MFC set to  0.000000
9/4/2012	11:05:36 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:05:36 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:05:36 AM	Tube furnace set to 0
9/4/2012	11:06:06 AM	H2 valve closed
9/4/2012	11:06:06 AM	BCl3 valve closed
9/4/2012	11:06:06 AM	PH3 valve closed
9/4/2012	11:06:06 AM	SiCl4 pre valve closed
9/4/2012	11:06:06 AM	SiCl4 post valve closed
9/4/2012	11:06:06 AM	Bypass valve closed
9/4/2012	11:06:06 AM	Bubbler valve closed
9/4/2012	11:06:06 AM	Helium valve opened
9/4/2012	11:06:06 AM	Main Vac valve opened
9/4/2012	11:06:06 AM	Helium MFC set to  20.000000
9/4/2012	11:06:06 AM	H2 MFC set to  0.000000
9/4/2012	11:06:06 AM	BCl3 MFC set to  0.000000
9/4/2012	11:06:06 AM	PH3 MFC set to  0.000000
9/4/2012	11:06:06 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:06:06 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:06:07 AM	Tube furnace set to 0
9/4/2012	11:06:37 AM	Helium valve closed
9/4/2012	11:06:37 AM	H2 valve closed
9/4/2012	11:06:37 AM	BCl3 valve closed
9/4/2012	11:06:37 AM	PH3 valve closed
9/4/2012	11:06:37 AM	SiCl4 pre valve closed
9/4/2012	11:06:37 AM	SiCl4 post valve closed
9/4/2012	11:06:37 AM	Bypass valve closed
9/4/2012	11:06:37 AM	Bubbler valve closed
9/4/2012	11:06:37 AM	Main Vac valve opened
9/4/2012	11:06:37 AM	Helium MFC set to  0.000000
9/4/2012	11:06:37 AM	H2 MFC set to  0.000000
9/4/2012	11:06:37 AM	BCl3 MFC set to  0.000000
9/4/2012	11:06:37 AM	PH3 MFC set to  0.000000
9/4/2012	11:06:37 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:06:37 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:06:37 AM	Tube furnace set to 0
9/4/2012	11:07:07 AM	H2 valve closed
9/4/2012	11:07:07 AM	BCl3 valve closed
9/4/2012	11:07:07 AM	PH3 valve closed
9/4/2012	11:07:07 AM	SiCl4 pre valve closed
9/4/2012	11:07:07 AM	SiCl4 post valve closed
9/4/2012	11:07:07 AM	Bypass valve closed
9/4/2012	11:07:07 AM	Bubbler valve closed
9/4/2012	11:07:07 AM	Helium valve opened
9/4/2012	11:07:07 AM	Main Vac valve opened
9/4/2012	11:07:07 AM	Helium MFC set to  20.000000
9/4/2012	11:07:07 AM	H2 MFC set to  0.000000
9/4/2012	11:07:07 AM	BCl3 MFC set to  0.000000
9/4/2012	11:07:07 AM	PH3 MFC set to  0.000000
9/4/2012	11:07:07 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:07:07 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:07:07 AM	Tube furnace set to 0
9/4/2012	11:07:37 AM	Helium valve closed
9/4/2012	11:07:37 AM	H2 valve closed
9/4/2012	11:07:37 AM	BCl3 valve closed
9/4/2012	11:07:37 AM	PH3 valve closed
9/4/2012	11:07:37 AM	SiCl4 pre valve closed
9/4/2012	11:07:37 AM	SiCl4 post valve closed
9/4/2012	11:07:37 AM	Bypass valve closed
9/4/2012	11:07:37 AM	Bubbler valve closed
9/4/2012	11:07:37 AM	Main Vac valve opened
9/4/2012	11:07:37 AM	Helium MFC set to  0.000000
9/4/2012	11:07:37 AM	H2 MFC set to  0.000000
9/4/2012	11:07:37 AM	BCl3 MFC set to  0.000000
9/4/2012	11:07:37 AM	PH3 MFC set to  0.000000
9/4/2012	11:07:37 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:07:37 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:07:37 AM	Tube furnace set to 0
9/4/2012	11:08:07 AM	H2 valve closed
9/4/2012	11:08:07 AM	BCl3 valve closed
9/4/2012	11:08:07 AM	PH3 valve closed
9/4/2012	11:08:07 AM	SiCl4 pre valve closed
9/4/2012	11:08:07 AM	SiCl4 post valve closed
9/4/2012	11:08:07 AM	Bypass valve closed
9/4/2012	11:08:07 AM	Bubbler valve closed
9/4/2012	11:08:07 AM	Helium valve opened
9/4/2012	11:08:07 AM	Main Vac valve opened
9/4/2012	11:08:07 AM	Helium MFC set to  20.000000
9/4/2012	11:08:07 AM	H2 MFC set to  0.000000
9/4/2012	11:08:07 AM	BCl3 MFC set to  0.000000
9/4/2012	11:08:07 AM	PH3 MFC set to  0.000000
9/4/2012	11:08:07 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:08:07 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:08:08 AM	Tube furnace set to 0
9/4/2012	11:08:38 AM	Helium valve closed
9/4/2012	11:08:38 AM	H2 valve closed
9/4/2012	11:08:38 AM	BCl3 valve closed
9/4/2012	11:08:38 AM	PH3 valve closed
9/4/2012	11:08:38 AM	SiCl4 pre valve closed
9/4/2012	11:08:38 AM	SiCl4 post valve closed
9/4/2012	11:08:38 AM	Bypass valve closed
9/4/2012	11:08:38 AM	Bubbler valve closed
9/4/2012	11:08:38 AM	Main Vac valve opened
9/4/2012	11:08:38 AM	Helium MFC set to  0.000000
9/4/2012	11:08:38 AM	H2 MFC set to  0.000000
9/4/2012	11:08:38 AM	BCl3 MFC set to  0.000000
9/4/2012	11:08:38 AM	PH3 MFC set to  0.000000
9/4/2012	11:08:38 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:08:38 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:08:38 AM	Tube furnace set to 0
9/4/2012	11:09:08 AM	H2 valve closed
9/4/2012	11:09:08 AM	BCl3 valve closed
9/4/2012	11:09:08 AM	PH3 valve closed
9/4/2012	11:09:08 AM	SiCl4 pre valve closed
9/4/2012	11:09:08 AM	SiCl4 post valve closed
9/4/2012	11:09:08 AM	Bypass valve closed
9/4/2012	11:09:08 AM	Bubbler valve closed
9/4/2012	11:09:08 AM	Helium valve opened
9/4/2012	11:09:08 AM	Main Vac valve opened
9/4/2012	11:09:08 AM	Helium MFC set to  20.000000
9/4/2012	11:09:08 AM	H2 MFC set to  0.000000
9/4/2012	11:09:08 AM	BCl3 MFC set to  0.000000
9/4/2012	11:09:08 AM	PH3 MFC set to  0.000000
9/4/2012	11:09:08 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:09:08 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:09:08 AM	Tube furnace set to 0
9/4/2012	11:09:38 AM	Helium valve closed
9/4/2012	11:09:38 AM	H2 valve closed
9/4/2012	11:09:38 AM	BCl3 valve closed
9/4/2012	11:09:38 AM	PH3 valve closed
9/4/2012	11:09:38 AM	SiCl4 pre valve closed
9/4/2012	11:09:38 AM	SiCl4 post valve closed
9/4/2012	11:09:38 AM	Bypass valve closed
9/4/2012	11:09:38 AM	Bubbler valve closed
9/4/2012	11:09:38 AM	Main Vac valve opened
9/4/2012	11:09:38 AM	Helium MFC set to  0.000000
9/4/2012	11:09:38 AM	H2 MFC set to  0.000000
9/4/2012	11:09:38 AM	BCl3 MFC set to  0.000000
9/4/2012	11:09:38 AM	PH3 MFC set to  0.000000
9/4/2012	11:09:38 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:09:38 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:09:38 AM	Tube furnace set to 0
9/4/2012	11:09:39 AM	Run finished at 11:09 AM
9/4/2012	11:09:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	11:12:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	11:12:25 AM	Recipe started at 11:12 AM
9/4/2012	11:12:25 AM	Helium valve closed
9/4/2012	11:12:25 AM	H2 valve closed
9/4/2012	11:12:25 AM	BCl3 valve closed
9/4/2012	11:12:25 AM	PH3 valve closed
9/4/2012	11:12:25 AM	SiCl4 pre valve closed
9/4/2012	11:12:25 AM	SiCl4 post valve closed
9/4/2012	11:12:25 AM	Main Vac valve closed
9/4/2012	11:12:25 AM	Bubbler valve closed
9/4/2012	11:12:25 AM	Bypass valve opened
9/4/2012	11:12:25 AM	Helium MFC set to  0.000000
9/4/2012	11:12:25 AM	H2 MFC set to  0.000000
9/4/2012	11:12:25 AM	BCl3 MFC set to  0.000000
9/4/2012	11:12:25 AM	PH3 MFC set to  0.000000
9/4/2012	11:12:25 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:12:25 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:12:25 AM	Tube furnace set to 0
9/4/2012	11:12:26 AM	Helium valve closed
9/4/2012	11:12:26 AM	H2 valve closed
9/4/2012	11:12:26 AM	BCl3 valve closed
9/4/2012	11:12:26 AM	PH3 valve closed
9/4/2012	11:12:26 AM	SiCl4 pre valve closed
9/4/2012	11:12:26 AM	SiCl4 post valve closed
9/4/2012	11:12:26 AM	Main Vac valve closed
9/4/2012	11:12:26 AM	Bubbler valve closed
9/4/2012	11:12:26 AM	Bypass valve opened
9/4/2012	11:12:26 AM	Helium MFC set to  0.000000
9/4/2012	11:12:26 AM	H2 MFC set to  0.000000
9/4/2012	11:12:26 AM	BCl3 MFC set to  0.000000
9/4/2012	11:12:26 AM	PH3 MFC set to  0.000000
9/4/2012	11:12:26 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:12:26 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:12:26 AM	Tube furnace set to 0
9/4/2012	11:12:26 AM	Helium valve closed
9/4/2012	11:12:26 AM	H2 valve closed
9/4/2012	11:12:26 AM	BCl3 valve closed
9/4/2012	11:12:26 AM	PH3 valve closed
9/4/2012	11:12:26 AM	SiCl4 pre valve closed
9/4/2012	11:12:26 AM	SiCl4 post valve closed
9/4/2012	11:12:26 AM	Bypass valve closed
9/4/2012	11:12:26 AM	Bubbler valve closed
9/4/2012	11:12:26 AM	Main Vac valve opened
9/4/2012	11:12:26 AM	Helium MFC set to  0.000000
9/4/2012	11:12:26 AM	H2 MFC set to  0.000000
9/4/2012	11:12:26 AM	BCl3 MFC set to  0.000000
9/4/2012	11:12:26 AM	PH3 MFC set to  0.000000
9/4/2012	11:12:26 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:12:26 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:12:26 AM	Tube furnace set to 0
9/4/2012	11:12:31 AM	H2 valve closed
9/4/2012	11:12:31 AM	BCl3 valve closed
9/4/2012	11:12:31 AM	PH3 valve closed
9/4/2012	11:12:31 AM	SiCl4 pre valve closed
9/4/2012	11:12:31 AM	SiCl4 post valve closed
9/4/2012	11:12:31 AM	Bypass valve closed
9/4/2012	11:12:31 AM	Bubbler valve closed
9/4/2012	11:12:31 AM	Helium valve opened
9/4/2012	11:12:31 AM	Main Vac valve opened
9/4/2012	11:12:31 AM	Helium MFC set to  20.000000
9/4/2012	11:12:31 AM	H2 MFC set to  0.000000
9/4/2012	11:12:31 AM	BCl3 MFC set to  0.000000
9/4/2012	11:12:31 AM	PH3 MFC set to  0.000000
9/4/2012	11:12:31 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:12:31 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:12:31 AM	Tube furnace set to 0
9/4/2012	11:13:01 AM	Helium valve closed
9/4/2012	11:13:01 AM	H2 valve closed
9/4/2012	11:13:01 AM	BCl3 valve closed
9/4/2012	11:13:01 AM	PH3 valve closed
9/4/2012	11:13:01 AM	SiCl4 pre valve closed
9/4/2012	11:13:01 AM	SiCl4 post valve closed
9/4/2012	11:13:01 AM	Bypass valve closed
9/4/2012	11:13:01 AM	Bubbler valve closed
9/4/2012	11:13:01 AM	Main Vac valve opened
9/4/2012	11:13:01 AM	Helium MFC set to  0.000000
9/4/2012	11:13:01 AM	H2 MFC set to  0.000000
9/4/2012	11:13:01 AM	BCl3 MFC set to  0.000000
9/4/2012	11:13:01 AM	PH3 MFC set to  0.000000
9/4/2012	11:13:01 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:13:01 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:13:01 AM	Tube furnace set to 0
9/4/2012	11:13:31 AM	H2 valve closed
9/4/2012	11:13:31 AM	BCl3 valve closed
9/4/2012	11:13:31 AM	PH3 valve closed
9/4/2012	11:13:31 AM	SiCl4 pre valve closed
9/4/2012	11:13:31 AM	SiCl4 post valve closed
9/4/2012	11:13:31 AM	Bypass valve closed
9/4/2012	11:13:31 AM	Bubbler valve closed
9/4/2012	11:13:31 AM	Helium valve opened
9/4/2012	11:13:31 AM	Main Vac valve opened
9/4/2012	11:13:31 AM	Helium MFC set to  20.000000
9/4/2012	11:13:31 AM	H2 MFC set to  0.000000
9/4/2012	11:13:31 AM	BCl3 MFC set to  0.000000
9/4/2012	11:13:31 AM	PH3 MFC set to  0.000000
9/4/2012	11:13:31 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:13:31 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:13:31 AM	Tube furnace set to 0
9/4/2012	11:14:01 AM	Helium valve closed
9/4/2012	11:14:01 AM	H2 valve closed
9/4/2012	11:14:01 AM	BCl3 valve closed
9/4/2012	11:14:01 AM	PH3 valve closed
9/4/2012	11:14:01 AM	SiCl4 pre valve closed
9/4/2012	11:14:01 AM	SiCl4 post valve closed
9/4/2012	11:14:01 AM	Bypass valve closed
9/4/2012	11:14:01 AM	Bubbler valve closed
9/4/2012	11:14:01 AM	Main Vac valve opened
9/4/2012	11:14:01 AM	Helium MFC set to  0.000000
9/4/2012	11:14:01 AM	H2 MFC set to  0.000000
9/4/2012	11:14:01 AM	BCl3 MFC set to  0.000000
9/4/2012	11:14:01 AM	PH3 MFC set to  0.000000
9/4/2012	11:14:01 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:14:02 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:14:02 AM	Tube furnace set to 0
9/4/2012	11:14:32 AM	H2 valve closed
9/4/2012	11:14:32 AM	BCl3 valve closed
9/4/2012	11:14:32 AM	PH3 valve closed
9/4/2012	11:14:32 AM	SiCl4 pre valve closed
9/4/2012	11:14:32 AM	SiCl4 post valve closed
9/4/2012	11:14:32 AM	Bypass valve closed
9/4/2012	11:14:32 AM	Bubbler valve closed
9/4/2012	11:14:32 AM	Helium valve opened
9/4/2012	11:14:32 AM	Main Vac valve opened
9/4/2012	11:14:32 AM	Helium MFC set to  20.000000
9/4/2012	11:14:32 AM	H2 MFC set to  0.000000
9/4/2012	11:14:32 AM	BCl3 MFC set to  0.000000
9/4/2012	11:14:32 AM	PH3 MFC set to  0.000000
9/4/2012	11:14:32 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:14:32 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:14:32 AM	Tube furnace set to 0
9/4/2012	11:15:02 AM	Helium valve closed
9/4/2012	11:15:02 AM	H2 valve closed
9/4/2012	11:15:02 AM	BCl3 valve closed
9/4/2012	11:15:02 AM	PH3 valve closed
9/4/2012	11:15:02 AM	SiCl4 pre valve closed
9/4/2012	11:15:02 AM	SiCl4 post valve closed
9/4/2012	11:15:02 AM	Bypass valve closed
9/4/2012	11:15:02 AM	Bubbler valve closed
9/4/2012	11:15:02 AM	Main Vac valve opened
9/4/2012	11:15:02 AM	Helium MFC set to  0.000000
9/4/2012	11:15:02 AM	H2 MFC set to  0.000000
9/4/2012	11:15:02 AM	BCl3 MFC set to  0.000000
9/4/2012	11:15:02 AM	PH3 MFC set to  0.000000
9/4/2012	11:15:02 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:15:02 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:15:02 AM	Tube furnace set to 0
9/4/2012	11:15:32 AM	H2 valve closed
9/4/2012	11:15:32 AM	BCl3 valve closed
9/4/2012	11:15:32 AM	PH3 valve closed
9/4/2012	11:15:32 AM	SiCl4 pre valve closed
9/4/2012	11:15:32 AM	SiCl4 post valve closed
9/4/2012	11:15:32 AM	Bypass valve closed
9/4/2012	11:15:32 AM	Bubbler valve closed
9/4/2012	11:15:32 AM	Helium valve opened
9/4/2012	11:15:32 AM	Main Vac valve opened
9/4/2012	11:15:32 AM	Helium MFC set to  20.000000
9/4/2012	11:15:32 AM	H2 MFC set to  0.000000
9/4/2012	11:15:32 AM	BCl3 MFC set to  0.000000
9/4/2012	11:15:32 AM	PH3 MFC set to  0.000000
9/4/2012	11:15:32 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:15:32 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:15:32 AM	Tube furnace set to 0
9/4/2012	11:16:02 AM	Helium valve closed
9/4/2012	11:16:02 AM	H2 valve closed
9/4/2012	11:16:02 AM	BCl3 valve closed
9/4/2012	11:16:02 AM	PH3 valve closed
9/4/2012	11:16:02 AM	SiCl4 pre valve closed
9/4/2012	11:16:02 AM	SiCl4 post valve closed
9/4/2012	11:16:02 AM	Bypass valve closed
9/4/2012	11:16:02 AM	Bubbler valve closed
9/4/2012	11:16:02 AM	Main Vac valve opened
9/4/2012	11:16:02 AM	Helium MFC set to  0.000000
9/4/2012	11:16:02 AM	H2 MFC set to  0.000000
9/4/2012	11:16:02 AM	BCl3 MFC set to  0.000000
9/4/2012	11:16:02 AM	PH3 MFC set to  0.000000
9/4/2012	11:16:02 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:16:02 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:16:03 AM	Tube furnace set to 0
9/4/2012	11:16:33 AM	H2 valve closed
9/4/2012	11:16:33 AM	BCl3 valve closed
9/4/2012	11:16:33 AM	PH3 valve closed
9/4/2012	11:16:33 AM	SiCl4 pre valve closed
9/4/2012	11:16:33 AM	SiCl4 post valve closed
9/4/2012	11:16:33 AM	Bypass valve closed
9/4/2012	11:16:33 AM	Bubbler valve closed
9/4/2012	11:16:33 AM	Helium valve opened
9/4/2012	11:16:33 AM	Main Vac valve opened
9/4/2012	11:16:33 AM	Helium MFC set to  20.000000
9/4/2012	11:16:33 AM	H2 MFC set to  0.000000
9/4/2012	11:16:33 AM	BCl3 MFC set to  0.000000
9/4/2012	11:16:33 AM	PH3 MFC set to  0.000000
9/4/2012	11:16:33 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:16:33 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:16:33 AM	Tube furnace set to 0
9/4/2012	11:17:03 AM	Helium valve closed
9/4/2012	11:17:03 AM	H2 valve closed
9/4/2012	11:17:03 AM	BCl3 valve closed
9/4/2012	11:17:03 AM	PH3 valve closed
9/4/2012	11:17:03 AM	SiCl4 pre valve closed
9/4/2012	11:17:03 AM	SiCl4 post valve closed
9/4/2012	11:17:03 AM	Bypass valve closed
9/4/2012	11:17:03 AM	Bubbler valve closed
9/4/2012	11:17:03 AM	Main Vac valve opened
9/4/2012	11:17:03 AM	Helium MFC set to  0.000000
9/4/2012	11:17:03 AM	H2 MFC set to  0.000000
9/4/2012	11:17:03 AM	BCl3 MFC set to  0.000000
9/4/2012	11:17:03 AM	PH3 MFC set to  0.000000
9/4/2012	11:17:03 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:17:03 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:17:03 AM	Tube furnace set to 0
9/4/2012	11:17:33 AM	H2 valve closed
9/4/2012	11:17:33 AM	BCl3 valve closed
9/4/2012	11:17:33 AM	PH3 valve closed
9/4/2012	11:17:33 AM	SiCl4 pre valve closed
9/4/2012	11:17:33 AM	SiCl4 post valve closed
9/4/2012	11:17:33 AM	Bypass valve closed
9/4/2012	11:17:33 AM	Bubbler valve closed
9/4/2012	11:17:33 AM	Helium valve opened
9/4/2012	11:17:33 AM	Main Vac valve opened
9/4/2012	11:17:33 AM	Helium MFC set to  20.000000
9/4/2012	11:17:33 AM	H2 MFC set to  0.000000
9/4/2012	11:17:33 AM	BCl3 MFC set to  0.000000
9/4/2012	11:17:33 AM	PH3 MFC set to  0.000000
9/4/2012	11:17:33 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:17:33 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:17:33 AM	Tube furnace set to 0
9/4/2012	11:18:03 AM	Helium valve closed
9/4/2012	11:18:03 AM	H2 valve closed
9/4/2012	11:18:03 AM	BCl3 valve closed
9/4/2012	11:18:03 AM	PH3 valve closed
9/4/2012	11:18:03 AM	SiCl4 pre valve closed
9/4/2012	11:18:03 AM	SiCl4 post valve closed
9/4/2012	11:18:03 AM	Bypass valve closed
9/4/2012	11:18:03 AM	Bubbler valve closed
9/4/2012	11:18:03 AM	Main Vac valve opened
9/4/2012	11:18:03 AM	Helium MFC set to  0.000000
9/4/2012	11:18:03 AM	H2 MFC set to  0.000000
9/4/2012	11:18:03 AM	BCl3 MFC set to  0.000000
9/4/2012	11:18:03 AM	PH3 MFC set to  0.000000
9/4/2012	11:18:03 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:18:03 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:18:04 AM	Tube furnace set to 0
9/4/2012	11:18:34 AM	H2 valve closed
9/4/2012	11:18:34 AM	BCl3 valve closed
9/4/2012	11:18:34 AM	PH3 valve closed
9/4/2012	11:18:34 AM	SiCl4 pre valve closed
9/4/2012	11:18:34 AM	SiCl4 post valve closed
9/4/2012	11:18:34 AM	Bypass valve closed
9/4/2012	11:18:34 AM	Bubbler valve closed
9/4/2012	11:18:34 AM	Helium valve opened
9/4/2012	11:18:34 AM	Main Vac valve opened
9/4/2012	11:18:34 AM	Helium MFC set to  20.000000
9/4/2012	11:18:34 AM	H2 MFC set to  0.000000
9/4/2012	11:18:34 AM	BCl3 MFC set to  0.000000
9/4/2012	11:18:34 AM	PH3 MFC set to  0.000000
9/4/2012	11:18:34 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:18:34 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:18:34 AM	Tube furnace set to 0
9/4/2012	11:19:04 AM	Helium valve closed
9/4/2012	11:19:04 AM	H2 valve closed
9/4/2012	11:19:04 AM	BCl3 valve closed
9/4/2012	11:19:04 AM	PH3 valve closed
9/4/2012	11:19:04 AM	SiCl4 pre valve closed
9/4/2012	11:19:04 AM	SiCl4 post valve closed
9/4/2012	11:19:04 AM	Bypass valve closed
9/4/2012	11:19:04 AM	Bubbler valve closed
9/4/2012	11:19:04 AM	Main Vac valve opened
9/4/2012	11:19:04 AM	Helium MFC set to  0.000000
9/4/2012	11:19:04 AM	H2 MFC set to  0.000000
9/4/2012	11:19:04 AM	BCl3 MFC set to  0.000000
9/4/2012	11:19:04 AM	PH3 MFC set to  0.000000
9/4/2012	11:19:04 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:19:04 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:19:04 AM	Tube furnace set to 0
9/4/2012	11:19:34 AM	H2 valve closed
9/4/2012	11:19:34 AM	BCl3 valve closed
9/4/2012	11:19:34 AM	PH3 valve closed
9/4/2012	11:19:34 AM	SiCl4 pre valve closed
9/4/2012	11:19:34 AM	SiCl4 post valve closed
9/4/2012	11:19:34 AM	Bypass valve closed
9/4/2012	11:19:34 AM	Bubbler valve closed
9/4/2012	11:19:34 AM	Helium valve opened
9/4/2012	11:19:34 AM	Main Vac valve opened
9/4/2012	11:19:34 AM	Helium MFC set to  20.000000
9/4/2012	11:19:34 AM	H2 MFC set to  0.000000
9/4/2012	11:19:34 AM	BCl3 MFC set to  0.000000
9/4/2012	11:19:34 AM	PH3 MFC set to  0.000000
9/4/2012	11:19:34 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:19:34 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:19:34 AM	Tube furnace set to 0
9/4/2012	11:20:04 AM	Helium valve closed
9/4/2012	11:20:04 AM	H2 valve closed
9/4/2012	11:20:04 AM	BCl3 valve closed
9/4/2012	11:20:04 AM	PH3 valve closed
9/4/2012	11:20:04 AM	SiCl4 pre valve closed
9/4/2012	11:20:04 AM	SiCl4 post valve closed
9/4/2012	11:20:04 AM	Bypass valve closed
9/4/2012	11:20:04 AM	Bubbler valve closed
9/4/2012	11:20:04 AM	Main Vac valve opened
9/4/2012	11:20:04 AM	Helium MFC set to  0.000000
9/4/2012	11:20:04 AM	H2 MFC set to  0.000000
9/4/2012	11:20:04 AM	BCl3 MFC set to  0.000000
9/4/2012	11:20:04 AM	PH3 MFC set to  0.000000
9/4/2012	11:20:04 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:20:04 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:20:04 AM	Tube furnace set to 0
9/4/2012	11:20:34 AM	H2 valve closed
9/4/2012	11:20:34 AM	BCl3 valve closed
9/4/2012	11:20:35 AM	PH3 valve closed
9/4/2012	11:20:35 AM	SiCl4 pre valve closed
9/4/2012	11:20:35 AM	SiCl4 post valve closed
9/4/2012	11:20:35 AM	Bypass valve closed
9/4/2012	11:20:35 AM	Bubbler valve closed
9/4/2012	11:20:35 AM	Helium valve opened
9/4/2012	11:20:35 AM	Main Vac valve opened
9/4/2012	11:20:35 AM	Helium MFC set to  20.000000
9/4/2012	11:20:35 AM	H2 MFC set to  0.000000
9/4/2012	11:20:35 AM	BCl3 MFC set to  0.000000
9/4/2012	11:20:35 AM	PH3 MFC set to  0.000000
9/4/2012	11:20:35 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:20:35 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:20:35 AM	Tube furnace set to 0
9/4/2012	11:21:05 AM	Helium valve closed
9/4/2012	11:21:05 AM	H2 valve closed
9/4/2012	11:21:05 AM	BCl3 valve closed
9/4/2012	11:21:05 AM	PH3 valve closed
9/4/2012	11:21:05 AM	SiCl4 pre valve closed
9/4/2012	11:21:05 AM	SiCl4 post valve closed
9/4/2012	11:21:05 AM	Bypass valve closed
9/4/2012	11:21:05 AM	Bubbler valve closed
9/4/2012	11:21:05 AM	Main Vac valve opened
9/4/2012	11:21:05 AM	Helium MFC set to  0.000000
9/4/2012	11:21:05 AM	H2 MFC set to  0.000000
9/4/2012	11:21:05 AM	BCl3 MFC set to  0.000000
9/4/2012	11:21:05 AM	PH3 MFC set to  0.000000
9/4/2012	11:21:05 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:21:05 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:21:05 AM	Tube furnace set to 0
9/4/2012	11:21:35 AM	H2 valve closed
9/4/2012	11:21:35 AM	BCl3 valve closed
9/4/2012	11:21:35 AM	PH3 valve closed
9/4/2012	11:21:35 AM	SiCl4 pre valve closed
9/4/2012	11:21:35 AM	SiCl4 post valve closed
9/4/2012	11:21:35 AM	Bypass valve closed
9/4/2012	11:21:35 AM	Bubbler valve closed
9/4/2012	11:21:35 AM	Helium valve opened
9/4/2012	11:21:35 AM	Main Vac valve opened
9/4/2012	11:21:35 AM	Helium MFC set to  20.000000
9/4/2012	11:21:35 AM	H2 MFC set to  0.000000
9/4/2012	11:21:35 AM	BCl3 MFC set to  0.000000
9/4/2012	11:21:35 AM	PH3 MFC set to  0.000000
9/4/2012	11:21:35 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:21:35 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:21:35 AM	Tube furnace set to 0
9/4/2012	11:22:05 AM	Helium valve closed
9/4/2012	11:22:05 AM	H2 valve closed
9/4/2012	11:22:05 AM	BCl3 valve closed
9/4/2012	11:22:05 AM	PH3 valve closed
9/4/2012	11:22:05 AM	SiCl4 pre valve closed
9/4/2012	11:22:05 AM	SiCl4 post valve closed
9/4/2012	11:22:05 AM	Bypass valve closed
9/4/2012	11:22:05 AM	Bubbler valve closed
9/4/2012	11:22:05 AM	Main Vac valve opened
9/4/2012	11:22:05 AM	Helium MFC set to  0.000000
9/4/2012	11:22:05 AM	H2 MFC set to  0.000000
9/4/2012	11:22:05 AM	BCl3 MFC set to  0.000000
9/4/2012	11:22:05 AM	PH3 MFC set to  0.000000
9/4/2012	11:22:05 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:22:05 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:22:05 AM	Tube furnace set to 0
9/4/2012	11:22:06 AM	Run finished at 11:22 AM
9/4/2012	11:22:06 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	11:28:48 AM	Recipe started at 11:28 AM
9/4/2012	11:28:48 AM	Helium valve closed
9/4/2012	11:28:48 AM	H2 valve closed
9/4/2012	11:28:48 AM	BCl3 valve closed
9/4/2012	11:28:48 AM	PH3 valve closed
9/4/2012	11:28:48 AM	SiCl4 pre valve closed
9/4/2012	11:28:48 AM	SiCl4 post valve closed
9/4/2012	11:28:48 AM	Main Vac valve closed
9/4/2012	11:28:48 AM	Bypass valve closed
9/4/2012	11:28:48 AM	Bubbler valve closed
9/4/2012	11:28:48 AM	Helium MFC set to  0.000000
9/4/2012	11:28:48 AM	H2 MFC set to  0.000000
9/4/2012	11:28:48 AM	BCl3 MFC set to  0.000000
9/4/2012	11:28:48 AM	PH3 MFC set to  0.000000
9/4/2012	11:28:48 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:28:48 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:28:49 AM	Tube furnace set to 0
9/4/2012	11:28:52 AM	Helium valve closed
9/4/2012	11:28:52 AM	BCl3 valve closed
9/4/2012	11:28:52 AM	PH3 valve closed
9/4/2012	11:28:52 AM	SiCl4 pre valve closed
9/4/2012	11:28:52 AM	SiCl4 post valve closed
9/4/2012	11:28:52 AM	Main Vac valve closed
9/4/2012	11:28:52 AM	Bypass valve closed
9/4/2012	11:28:52 AM	Bubbler valve closed
9/4/2012	11:28:52 AM	H2 valve opened
9/4/2012	11:28:52 AM	Helium MFC set to  0.000000
9/4/2012	11:28:52 AM	H2 MFC set to  500.000000
9/4/2012	11:28:52 AM	BCl3 MFC set to  0.000000
9/4/2012	11:28:52 AM	PH3 MFC set to  0.000000
9/4/2012	11:28:52 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:28:52 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:28:52 AM	Tube furnace set to 0
9/4/2012	11:30:09 AM	Helium valve closed
9/4/2012	11:30:09 AM	BCl3 valve closed
9/4/2012	11:30:09 AM	PH3 valve closed
9/4/2012	11:30:09 AM	SiCl4 pre valve closed
9/4/2012	11:30:09 AM	SiCl4 post valve closed
9/4/2012	11:30:09 AM	Main Vac valve closed
9/4/2012	11:30:09 AM	Bypass valve closed
9/4/2012	11:30:09 AM	H2 valve opened
9/4/2012	11:30:09 AM	Bubbler valve opened
9/4/2012	11:30:09 AM	Helium MFC set to  0.000000
9/4/2012	11:30:09 AM	H2 MFC set to  500.000000
9/4/2012	11:30:09 AM	BCl3 MFC set to  0.000000
9/4/2012	11:30:09 AM	PH3 MFC set to  0.000000
9/4/2012	11:30:09 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:30:09 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:30:09 AM	Tube furnace set to 0
9/4/2012	11:30:10 AM	Helium valve closed
9/4/2012	11:30:10 AM	BCl3 valve closed
9/4/2012	11:30:10 AM	PH3 valve closed
9/4/2012	11:30:10 AM	SiCl4 pre valve closed
9/4/2012	11:30:10 AM	SiCl4 post valve closed
9/4/2012	11:30:10 AM	Main Vac valve closed
9/4/2012	11:30:10 AM	Bypass valve closed
9/4/2012	11:30:10 AM	H2 valve opened
9/4/2012	11:30:10 AM	Bubbler valve opened
9/4/2012	11:30:10 AM	Helium MFC set to  0.000000
9/4/2012	11:30:10 AM	H2 MFC set to  500.000000
9/4/2012	11:30:10 AM	BCl3 MFC set to  0.000000
9/4/2012	11:30:10 AM	PH3 MFC set to  0.000000
9/4/2012	11:30:10 AM	SiCl4 MFC set to  0.000000
9/4/2012	11:30:10 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:30:10 AM	Tube furnace set to 1000
9/4/2012	11:50:10 AM	Helium valve closed
9/4/2012	11:50:10 AM	PH3 valve closed
9/4/2012	11:50:10 AM	Main Vac valve closed
9/4/2012	11:50:10 AM	Bypass valve closed
9/4/2012	11:50:10 AM	H2 valve opened
9/4/2012	11:50:10 AM	BCl3 valve opened
9/4/2012	11:50:10 AM	SiCl4 pre valve opened
9/4/2012	11:50:10 AM	SiCl4 post valve opened
9/4/2012	11:50:10 AM	Bubbler valve opened
9/4/2012	11:50:10 AM	Helium MFC set to  0.000000
9/4/2012	11:50:10 AM	H2 MFC set to  500.000000
9/4/2012	11:50:10 AM	BCl3 MFC set to  1.300000
9/4/2012	11:50:10 AM	PH3 MFC set to  0.000000
9/4/2012	11:50:10 AM	SiCl4 MFC set to  50.000000
9/4/2012	11:50:10 AM	Bypass solenoid MFC set to  0.000000
9/4/2012	11:50:10 AM	Tube furnace set to 1000
9/4/2012	12:10:10 PM	Helium valve closed
9/4/2012	12:10:10 PM	BCl3 valve closed
9/4/2012	12:10:10 PM	PH3 valve closed
9/4/2012	12:10:10 PM	SiCl4 pre valve closed
9/4/2012	12:10:10 PM	SiCl4 post valve closed
9/4/2012	12:10:10 PM	Main Vac valve closed
9/4/2012	12:10:10 PM	Bypass valve closed
9/4/2012	12:10:10 PM	H2 valve opened
9/4/2012	12:10:10 PM	Bubbler valve opened
9/4/2012	12:10:10 PM	Helium MFC set to  0.000000
9/4/2012	12:10:10 PM	H2 MFC set to  500.000000
9/4/2012	12:10:10 PM	BCl3 MFC set to  0.000000
9/4/2012	12:10:10 PM	PH3 MFC set to  0.000000
9/4/2012	12:10:10 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:10:10 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:10:11 PM	Tube furnace set to 750
9/4/2012	12:15:11 PM	H2 valve closed
9/4/2012	12:15:11 PM	BCl3 valve closed
9/4/2012	12:15:11 PM	PH3 valve closed
9/4/2012	12:15:11 PM	SiCl4 pre valve closed
9/4/2012	12:15:11 PM	SiCl4 post valve closed
9/4/2012	12:15:11 PM	Main Vac valve closed
9/4/2012	12:15:11 PM	Bypass valve closed
9/4/2012	12:15:11 PM	Helium valve opened
9/4/2012	12:15:11 PM	Bubbler valve opened
9/4/2012	12:15:11 PM	Helium MFC set to  500.000000
9/4/2012	12:15:11 PM	H2 MFC set to  0.000000
9/4/2012	12:15:11 PM	BCl3 MFC set to  0.000000
9/4/2012	12:15:11 PM	PH3 MFC set to  0.000000
9/4/2012	12:15:11 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:15:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:15:11 PM	Tube furnace set to 0
9/4/2012	12:35:11 PM	Helium valve closed
9/4/2012	12:35:11 PM	H2 valve closed
9/4/2012	12:35:11 PM	BCl3 valve closed
9/4/2012	12:35:11 PM	PH3 valve closed
9/4/2012	12:35:11 PM	SiCl4 pre valve closed
9/4/2012	12:35:11 PM	SiCl4 post valve closed
9/4/2012	12:35:11 PM	Main Vac valve closed
9/4/2012	12:35:11 PM	Bypass valve closed
9/4/2012	12:35:11 PM	Bubbler valve closed
9/4/2012	12:35:11 PM	Helium MFC set to  0.000000
9/4/2012	12:35:11 PM	H2 MFC set to  0.000000
9/4/2012	12:35:11 PM	BCl3 MFC set to  0.000000
9/4/2012	12:35:11 PM	PH3 MFC set to  0.000000
9/4/2012	12:35:11 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:35:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:35:11 PM	Tube furnace set to 0
9/4/2012	12:35:12 PM	Run finished at 12:35 PM
9/4/2012	12:41:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	12:41:54 PM	Recipe started at 12:41 PM
9/4/2012	12:41:54 PM	Helium valve closed
9/4/2012	12:41:54 PM	H2 valve closed
9/4/2012	12:41:54 PM	BCl3 valve closed
9/4/2012	12:41:54 PM	PH3 valve closed
9/4/2012	12:41:54 PM	SiCl4 pre valve closed
9/4/2012	12:41:54 PM	SiCl4 post valve closed
9/4/2012	12:41:54 PM	Main Vac valve closed
9/4/2012	12:41:54 PM	Bypass valve closed
9/4/2012	12:41:54 PM	Bubbler valve closed
9/4/2012	12:41:54 PM	Helium MFC set to  0.000000
9/4/2012	12:41:54 PM	H2 MFC set to  0.000000
9/4/2012	12:41:54 PM	BCl3 MFC set to  0.000000
9/4/2012	12:41:54 PM	PH3 MFC set to  0.000000
9/4/2012	12:41:54 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:41:54 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:41:54 PM	Tube furnace set to 0
9/4/2012	12:41:57 PM	H2 valve closed
9/4/2012	12:41:57 PM	BCl3 valve closed
9/4/2012	12:41:57 PM	PH3 valve closed
9/4/2012	12:41:57 PM	SiCl4 pre valve closed
9/4/2012	12:41:57 PM	SiCl4 post valve closed
9/4/2012	12:41:57 PM	Main Vac valve closed
9/4/2012	12:41:57 PM	Bypass valve closed
9/4/2012	12:41:57 PM	Bubbler valve closed
9/4/2012	12:41:57 PM	Helium valve opened
9/4/2012	12:41:57 PM	Helium MFC set to  500.000000
9/4/2012	12:41:57 PM	H2 MFC set to  0.000000
9/4/2012	12:41:57 PM	BCl3 MFC set to  0.000000
9/4/2012	12:41:57 PM	PH3 MFC set to  0.000000
9/4/2012	12:41:57 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:41:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:41:57 PM	Tube furnace set to 0
9/4/2012	12:41:58 PM	Helium valve closed
9/4/2012	12:41:58 PM	H2 valve closed
9/4/2012	12:41:58 PM	BCl3 valve closed
9/4/2012	12:41:58 PM	PH3 valve closed
9/4/2012	12:41:58 PM	SiCl4 pre valve closed
9/4/2012	12:41:58 PM	SiCl4 post valve closed
9/4/2012	12:41:58 PM	Main Vac valve closed
9/4/2012	12:41:58 PM	Bypass valve closed
9/4/2012	12:41:58 PM	Bubbler valve closed
9/4/2012	12:41:58 PM	Helium MFC set to  0.000000
9/4/2012	12:41:58 PM	H2 MFC set to  0.000000
9/4/2012	12:41:58 PM	BCl3 MFC set to  0.000000
9/4/2012	12:41:58 PM	PH3 MFC set to  0.000000
9/4/2012	12:41:58 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:41:58 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:41:58 PM	Tube furnace set to 0
9/4/2012	12:41:59 PM	Run finished at 12:41 PM
9/4/2012	12:41:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	12:51:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	12:51:37 PM	Recipe started at 12:51 PM
9/4/2012	12:51:37 PM	Helium valve closed
9/4/2012	12:51:37 PM	H2 valve closed
9/4/2012	12:51:37 PM	BCl3 valve closed
9/4/2012	12:51:37 PM	PH3 valve closed
9/4/2012	12:51:37 PM	SiCl4 pre valve closed
9/4/2012	12:51:37 PM	SiCl4 post valve closed
9/4/2012	12:51:37 PM	Main Vac valve closed
9/4/2012	12:51:37 PM	Bubbler valve closed
9/4/2012	12:51:37 PM	Bypass valve opened
9/4/2012	12:51:37 PM	Helium MFC set to  0.000000
9/4/2012	12:51:37 PM	H2 MFC set to  0.000000
9/4/2012	12:51:37 PM	BCl3 MFC set to  0.000000
9/4/2012	12:51:37 PM	PH3 MFC set to  0.000000
9/4/2012	12:51:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:51:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:51:38 PM	Tube furnace set to 0
9/4/2012	12:52:56 PM	Helium valve closed
9/4/2012	12:52:56 PM	H2 valve closed
9/4/2012	12:52:56 PM	BCl3 valve closed
9/4/2012	12:52:56 PM	PH3 valve closed
9/4/2012	12:52:56 PM	SiCl4 pre valve closed
9/4/2012	12:52:56 PM	SiCl4 post valve closed
9/4/2012	12:52:56 PM	Main Vac valve closed
9/4/2012	12:52:56 PM	Bubbler valve closed
9/4/2012	12:52:56 PM	Bypass valve opened
9/4/2012	12:52:56 PM	Helium MFC set to  0.000000
9/4/2012	12:52:56 PM	H2 MFC set to  0.000000
9/4/2012	12:52:56 PM	BCl3 MFC set to  0.000000
9/4/2012	12:52:56 PM	PH3 MFC set to  0.000000
9/4/2012	12:52:56 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:52:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:52:56 PM	Tube furnace set to 0
9/4/2012	12:53:56 PM	Helium valve closed
9/4/2012	12:53:56 PM	H2 valve closed
9/4/2012	12:53:56 PM	BCl3 valve closed
9/4/2012	12:53:56 PM	PH3 valve closed
9/4/2012	12:53:56 PM	SiCl4 pre valve closed
9/4/2012	12:53:56 PM	SiCl4 post valve closed
9/4/2012	12:53:56 PM	Bypass valve closed
9/4/2012	12:53:56 PM	Bubbler valve closed
9/4/2012	12:53:56 PM	Main Vac valve opened
9/4/2012	12:53:56 PM	Helium MFC set to  0.000000
9/4/2012	12:53:56 PM	H2 MFC set to  0.000000
9/4/2012	12:53:56 PM	BCl3 MFC set to  0.000000
9/4/2012	12:53:56 PM	PH3 MFC set to  0.000000
9/4/2012	12:53:56 PM	SiCl4 MFC set to  0.000000
9/4/2012	12:53:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	12:53:57 PM	Tube furnace set to 0
9/4/2012	12:53:58 PM	Run finished at 12:53 PM
9/4/2012	12:53:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	2:10:40 PM	Helium MFC set to  10.000000
9/4/2012	2:10:44 PM	Helium valve opened
9/4/2012	2:10:45 PM	Helium valve closed
9/4/2012	2:10:46 PM	Helium valve opened
9/4/2012	2:10:46 PM	Helium valve closed
9/4/2012	2:10:46 PM	Helium valve opened
9/4/2012	2:10:47 PM	Helium valve closed
9/4/2012	2:10:49 PM	Helium MFC set to  0.000000
9/4/2012	2:16:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	2:16:32 PM	Recipe started at 2:16 PM
9/4/2012	2:16:32 PM	Helium valve closed
9/4/2012	2:16:32 PM	H2 valve closed
9/4/2012	2:16:32 PM	BCl3 valve closed
9/4/2012	2:16:32 PM	PH3 valve closed
9/4/2012	2:16:32 PM	SiCl4 pre valve closed
9/4/2012	2:16:32 PM	SiCl4 post valve closed
9/4/2012	2:16:32 PM	Main Vac valve closed
9/4/2012	2:16:32 PM	Bypass valve closed
9/4/2012	2:16:32 PM	Bubbler valve closed
9/4/2012	2:16:32 PM	Helium MFC set to  0.000000
9/4/2012	2:16:32 PM	H2 MFC set to  0.000000
9/4/2012	2:16:32 PM	BCl3 MFC set to  0.000000
9/4/2012	2:16:32 PM	PH3 MFC set to  0.000000
9/4/2012	2:16:32 PM	SiCl4 MFC set to  0.000000
9/4/2012	2:16:32 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	2:16:32 PM	Tube furnace set to 0
9/4/2012	2:16:35 PM	H2 valve closed
9/4/2012	2:16:35 PM	BCl3 valve closed
9/4/2012	2:16:35 PM	PH3 valve closed
9/4/2012	2:16:35 PM	SiCl4 pre valve closed
9/4/2012	2:16:35 PM	SiCl4 post valve closed
9/4/2012	2:16:35 PM	Main Vac valve closed
9/4/2012	2:16:35 PM	Bypass valve closed
9/4/2012	2:16:35 PM	Bubbler valve closed
9/4/2012	2:16:35 PM	Helium valve opened
9/4/2012	2:16:35 PM	Helium MFC set to  500.000000
9/4/2012	2:16:35 PM	H2 MFC set to  0.000000
9/4/2012	2:16:35 PM	BCl3 MFC set to  0.000000
9/4/2012	2:16:35 PM	PH3 MFC set to  0.000000
9/4/2012	2:16:35 PM	SiCl4 MFC set to  0.000000
9/4/2012	2:16:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	2:16:35 PM	Tube furnace set to 0
9/4/2012	2:17:48 PM	Helium valve closed
9/4/2012	2:17:48 PM	H2 valve closed
9/4/2012	2:17:48 PM	BCl3 valve closed
9/4/2012	2:17:48 PM	PH3 valve closed
9/4/2012	2:17:48 PM	SiCl4 pre valve closed
9/4/2012	2:17:48 PM	SiCl4 post valve closed
9/4/2012	2:17:48 PM	Main Vac valve closed
9/4/2012	2:17:48 PM	Bypass valve closed
9/4/2012	2:17:48 PM	Bubbler valve closed
9/4/2012	2:17:48 PM	Helium MFC set to  0.000000
9/4/2012	2:17:48 PM	H2 MFC set to  0.000000
9/4/2012	2:17:48 PM	BCl3 MFC set to  0.000000
9/4/2012	2:17:48 PM	PH3 MFC set to  0.000000
9/4/2012	2:17:48 PM	SiCl4 MFC set to  0.000000
9/4/2012	2:17:48 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	2:17:49 PM	Tube furnace set to 0
9/4/2012	2:17:50 PM	Run finished at 2:17 PM
9/4/2012	2:17:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	4:47:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	4:47:07 PM	Recipe started at 4:47 PM
9/4/2012	4:47:07 PM	Helium valve closed
9/4/2012	4:47:07 PM	H2 valve closed
9/4/2012	4:47:07 PM	BCl3 valve closed
9/4/2012	4:47:07 PM	PH3 valve closed
9/4/2012	4:47:07 PM	SiCl4 pre valve closed
9/4/2012	4:47:07 PM	SiCl4 post valve closed
9/4/2012	4:47:07 PM	Main Vac valve closed
9/4/2012	4:47:07 PM	Bubbler valve closed
9/4/2012	4:47:07 PM	Bypass valve opened
9/4/2012	4:47:07 PM	Helium MFC set to  0.000000
9/4/2012	4:47:07 PM	H2 MFC set to  0.000000
9/4/2012	4:47:07 PM	BCl3 MFC set to  0.000000
9/4/2012	4:47:07 PM	PH3 MFC set to  0.000000
9/4/2012	4:47:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:47:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:47:08 PM	Tube furnace set to 0
9/4/2012	4:48:56 PM	Helium valve closed
9/4/2012	4:48:56 PM	H2 valve closed
9/4/2012	4:48:56 PM	BCl3 valve closed
9/4/2012	4:48:56 PM	PH3 valve closed
9/4/2012	4:48:56 PM	SiCl4 pre valve closed
9/4/2012	4:48:56 PM	SiCl4 post valve closed
9/4/2012	4:48:56 PM	Main Vac valve closed
9/4/2012	4:48:56 PM	Bubbler valve closed
9/4/2012	4:48:56 PM	Bypass valve opened
9/4/2012	4:48:56 PM	Helium MFC set to  0.000000
9/4/2012	4:48:56 PM	H2 MFC set to  0.000000
9/4/2012	4:48:56 PM	BCl3 MFC set to  0.000000
9/4/2012	4:48:56 PM	PH3 MFC set to  0.000000
9/4/2012	4:48:56 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:48:56 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:48:57 PM	Tube furnace set to 0
9/4/2012	4:49:17 PM	Helium valve closed
9/4/2012	4:49:17 PM	H2 valve closed
9/4/2012	4:49:17 PM	BCl3 valve closed
9/4/2012	4:49:17 PM	PH3 valve closed
9/4/2012	4:49:17 PM	SiCl4 pre valve closed
9/4/2012	4:49:17 PM	SiCl4 post valve closed
9/4/2012	4:49:17 PM	Bypass valve closed
9/4/2012	4:49:17 PM	Bubbler valve closed
9/4/2012	4:49:17 PM	Main Vac valve opened
9/4/2012	4:49:17 PM	Helium MFC set to  0.000000
9/4/2012	4:49:17 PM	H2 MFC set to  0.000000
9/4/2012	4:49:17 PM	BCl3 MFC set to  0.000000
9/4/2012	4:49:17 PM	PH3 MFC set to  0.000000
9/4/2012	4:49:17 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:49:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:49:17 PM	Tube furnace set to 0
9/4/2012	4:49:18 PM	Run finished at 4:49 PM
9/4/2012	4:49:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	4:50:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	4:51:01 PM	Recipe started at 4:50 PM
9/4/2012	4:51:01 PM	Helium valve closed
9/4/2012	4:51:01 PM	H2 valve closed
9/4/2012	4:51:01 PM	BCl3 valve closed
9/4/2012	4:51:01 PM	PH3 valve closed
9/4/2012	4:51:01 PM	SiCl4 pre valve closed
9/4/2012	4:51:01 PM	SiCl4 post valve closed
9/4/2012	4:51:01 PM	Main Vac valve closed
9/4/2012	4:51:01 PM	Bubbler valve closed
9/4/2012	4:51:01 PM	Bypass valve opened
9/4/2012	4:51:01 PM	Helium MFC set to  0.000000
9/4/2012	4:51:01 PM	H2 MFC set to  0.000000
9/4/2012	4:51:01 PM	BCl3 MFC set to  0.000000
9/4/2012	4:51:01 PM	PH3 MFC set to  0.000000
9/4/2012	4:51:01 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:51:01 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:51:01 PM	Tube furnace set to 0
9/4/2012	4:51:02 PM	Helium valve closed
9/4/2012	4:51:02 PM	H2 valve closed
9/4/2012	4:51:02 PM	BCl3 valve closed
9/4/2012	4:51:02 PM	PH3 valve closed
9/4/2012	4:51:02 PM	SiCl4 pre valve closed
9/4/2012	4:51:02 PM	SiCl4 post valve closed
9/4/2012	4:51:02 PM	Main Vac valve closed
9/4/2012	4:51:02 PM	Bubbler valve closed
9/4/2012	4:51:02 PM	Bypass valve opened
9/4/2012	4:51:02 PM	Helium MFC set to  0.000000
9/4/2012	4:51:02 PM	H2 MFC set to  0.000000
9/4/2012	4:51:02 PM	BCl3 MFC set to  0.000000
9/4/2012	4:51:02 PM	PH3 MFC set to  0.000000
9/4/2012	4:51:02 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:51:02 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:51:02 PM	Tube furnace set to 0
9/4/2012	4:51:04 PM	Helium valve closed
9/4/2012	4:51:04 PM	H2 valve closed
9/4/2012	4:51:04 PM	BCl3 valve closed
9/4/2012	4:51:04 PM	PH3 valve closed
9/4/2012	4:51:04 PM	SiCl4 pre valve closed
9/4/2012	4:51:04 PM	SiCl4 post valve closed
9/4/2012	4:51:04 PM	Bypass valve closed
9/4/2012	4:51:04 PM	Bubbler valve closed
9/4/2012	4:51:04 PM	Main Vac valve opened
9/4/2012	4:51:04 PM	Helium MFC set to  0.000000
9/4/2012	4:51:04 PM	H2 MFC set to  0.000000
9/4/2012	4:51:04 PM	BCl3 MFC set to  0.000000
9/4/2012	4:51:04 PM	PH3 MFC set to  0.000000
9/4/2012	4:51:04 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:51:04 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:51:04 PM	Tube furnace set to 0
9/4/2012	4:51:34 PM	H2 valve closed
9/4/2012	4:51:34 PM	BCl3 valve closed
9/4/2012	4:51:34 PM	PH3 valve closed
9/4/2012	4:51:34 PM	SiCl4 pre valve closed
9/4/2012	4:51:34 PM	SiCl4 post valve closed
9/4/2012	4:51:34 PM	Bypass valve closed
9/4/2012	4:51:34 PM	Bubbler valve closed
9/4/2012	4:51:34 PM	Helium valve opened
9/4/2012	4:51:34 PM	Main Vac valve opened
9/4/2012	4:51:34 PM	Helium MFC set to  20.000000
9/4/2012	4:51:34 PM	H2 MFC set to  0.000000
9/4/2012	4:51:34 PM	BCl3 MFC set to  0.000000
9/4/2012	4:51:34 PM	PH3 MFC set to  0.000000
9/4/2012	4:51:34 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:51:34 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:51:35 PM	Tube furnace set to 0
9/4/2012	4:52:05 PM	Helium valve closed
9/4/2012	4:52:05 PM	H2 valve closed
9/4/2012	4:52:05 PM	BCl3 valve closed
9/4/2012	4:52:05 PM	PH3 valve closed
9/4/2012	4:52:05 PM	SiCl4 pre valve closed
9/4/2012	4:52:05 PM	SiCl4 post valve closed
9/4/2012	4:52:05 PM	Bypass valve closed
9/4/2012	4:52:05 PM	Bubbler valve closed
9/4/2012	4:52:05 PM	Main Vac valve opened
9/4/2012	4:52:05 PM	Helium MFC set to  0.000000
9/4/2012	4:52:05 PM	H2 MFC set to  0.000000
9/4/2012	4:52:05 PM	BCl3 MFC set to  0.000000
9/4/2012	4:52:05 PM	PH3 MFC set to  0.000000
9/4/2012	4:52:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:52:05 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:52:05 PM	Tube furnace set to 0
9/4/2012	4:52:35 PM	H2 valve closed
9/4/2012	4:52:35 PM	BCl3 valve closed
9/4/2012	4:52:35 PM	PH3 valve closed
9/4/2012	4:52:35 PM	SiCl4 pre valve closed
9/4/2012	4:52:35 PM	SiCl4 post valve closed
9/4/2012	4:52:35 PM	Bypass valve closed
9/4/2012	4:52:35 PM	Bubbler valve closed
9/4/2012	4:52:35 PM	Helium valve opened
9/4/2012	4:52:35 PM	Main Vac valve opened
9/4/2012	4:52:35 PM	Helium MFC set to  20.000000
9/4/2012	4:52:35 PM	H2 MFC set to  0.000000
9/4/2012	4:52:35 PM	BCl3 MFC set to  0.000000
9/4/2012	4:52:35 PM	PH3 MFC set to  0.000000
9/4/2012	4:52:35 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:52:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:52:35 PM	Tube furnace set to 0
9/4/2012	4:53:05 PM	Helium valve closed
9/4/2012	4:53:05 PM	H2 valve closed
9/4/2012	4:53:05 PM	BCl3 valve closed
9/4/2012	4:53:05 PM	PH3 valve closed
9/4/2012	4:53:05 PM	SiCl4 pre valve closed
9/4/2012	4:53:05 PM	SiCl4 post valve closed
9/4/2012	4:53:05 PM	Bypass valve closed
9/4/2012	4:53:05 PM	Bubbler valve closed
9/4/2012	4:53:05 PM	Main Vac valve opened
9/4/2012	4:53:05 PM	Helium MFC set to  0.000000
9/4/2012	4:53:05 PM	H2 MFC set to  0.000000
9/4/2012	4:53:05 PM	BCl3 MFC set to  0.000000
9/4/2012	4:53:05 PM	PH3 MFC set to  0.000000
9/4/2012	4:53:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:53:05 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:53:05 PM	Tube furnace set to 0
9/4/2012	4:53:35 PM	H2 valve closed
9/4/2012	4:53:35 PM	BCl3 valve closed
9/4/2012	4:53:35 PM	PH3 valve closed
9/4/2012	4:53:35 PM	SiCl4 pre valve closed
9/4/2012	4:53:35 PM	SiCl4 post valve closed
9/4/2012	4:53:35 PM	Bypass valve closed
9/4/2012	4:53:35 PM	Bubbler valve closed
9/4/2012	4:53:35 PM	Helium valve opened
9/4/2012	4:53:35 PM	Main Vac valve opened
9/4/2012	4:53:35 PM	Helium MFC set to  20.000000
9/4/2012	4:53:35 PM	H2 MFC set to  0.000000
9/4/2012	4:53:35 PM	BCl3 MFC set to  0.000000
9/4/2012	4:53:35 PM	PH3 MFC set to  0.000000
9/4/2012	4:53:35 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:53:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:53:36 PM	Tube furnace set to 0
9/4/2012	4:54:06 PM	Helium valve closed
9/4/2012	4:54:06 PM	H2 valve closed
9/4/2012	4:54:06 PM	BCl3 valve closed
9/4/2012	4:54:06 PM	PH3 valve closed
9/4/2012	4:54:06 PM	SiCl4 pre valve closed
9/4/2012	4:54:06 PM	SiCl4 post valve closed
9/4/2012	4:54:06 PM	Bypass valve closed
9/4/2012	4:54:06 PM	Bubbler valve closed
9/4/2012	4:54:06 PM	Main Vac valve opened
9/4/2012	4:54:06 PM	Helium MFC set to  0.000000
9/4/2012	4:54:06 PM	H2 MFC set to  0.000000
9/4/2012	4:54:06 PM	BCl3 MFC set to  0.000000
9/4/2012	4:54:06 PM	PH3 MFC set to  0.000000
9/4/2012	4:54:06 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:54:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:54:06 PM	Tube furnace set to 0
9/4/2012	4:54:36 PM	H2 valve closed
9/4/2012	4:54:36 PM	BCl3 valve closed
9/4/2012	4:54:36 PM	PH3 valve closed
9/4/2012	4:54:36 PM	SiCl4 pre valve closed
9/4/2012	4:54:36 PM	SiCl4 post valve closed
9/4/2012	4:54:36 PM	Bypass valve closed
9/4/2012	4:54:36 PM	Bubbler valve closed
9/4/2012	4:54:36 PM	Helium valve opened
9/4/2012	4:54:36 PM	Main Vac valve opened
9/4/2012	4:54:36 PM	Helium MFC set to  20.000000
9/4/2012	4:54:36 PM	H2 MFC set to  0.000000
9/4/2012	4:54:36 PM	BCl3 MFC set to  0.000000
9/4/2012	4:54:36 PM	PH3 MFC set to  0.000000
9/4/2012	4:54:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:54:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:54:36 PM	Tube furnace set to 0
9/4/2012	4:55:06 PM	Helium valve closed
9/4/2012	4:55:06 PM	H2 valve closed
9/4/2012	4:55:06 PM	BCl3 valve closed
9/4/2012	4:55:06 PM	PH3 valve closed
9/4/2012	4:55:06 PM	SiCl4 pre valve closed
9/4/2012	4:55:06 PM	SiCl4 post valve closed
9/4/2012	4:55:06 PM	Bypass valve closed
9/4/2012	4:55:06 PM	Bubbler valve closed
9/4/2012	4:55:06 PM	Main Vac valve opened
9/4/2012	4:55:06 PM	Helium MFC set to  0.000000
9/4/2012	4:55:06 PM	H2 MFC set to  0.000000
9/4/2012	4:55:06 PM	BCl3 MFC set to  0.000000
9/4/2012	4:55:06 PM	PH3 MFC set to  0.000000
9/4/2012	4:55:06 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:55:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:55:06 PM	Tube furnace set to 0
9/4/2012	4:55:36 PM	H2 valve closed
9/4/2012	4:55:36 PM	BCl3 valve closed
9/4/2012	4:55:36 PM	PH3 valve closed
9/4/2012	4:55:36 PM	SiCl4 pre valve closed
9/4/2012	4:55:36 PM	SiCl4 post valve closed
9/4/2012	4:55:36 PM	Bypass valve closed
9/4/2012	4:55:36 PM	Bubbler valve closed
9/4/2012	4:55:36 PM	Helium valve opened
9/4/2012	4:55:36 PM	Main Vac valve opened
9/4/2012	4:55:36 PM	Helium MFC set to  20.000000
9/4/2012	4:55:36 PM	H2 MFC set to  0.000000
9/4/2012	4:55:36 PM	BCl3 MFC set to  0.000000
9/4/2012	4:55:36 PM	PH3 MFC set to  0.000000
9/4/2012	4:55:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:55:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:55:36 PM	Tube furnace set to 0
9/4/2012	4:56:06 PM	Helium valve closed
9/4/2012	4:56:06 PM	H2 valve closed
9/4/2012	4:56:07 PM	BCl3 valve closed
9/4/2012	4:56:07 PM	PH3 valve closed
9/4/2012	4:56:07 PM	SiCl4 pre valve closed
9/4/2012	4:56:07 PM	SiCl4 post valve closed
9/4/2012	4:56:07 PM	Bypass valve closed
9/4/2012	4:56:07 PM	Bubbler valve closed
9/4/2012	4:56:07 PM	Main Vac valve opened
9/4/2012	4:56:07 PM	Helium MFC set to  0.000000
9/4/2012	4:56:07 PM	H2 MFC set to  0.000000
9/4/2012	4:56:07 PM	BCl3 MFC set to  0.000000
9/4/2012	4:56:07 PM	PH3 MFC set to  0.000000
9/4/2012	4:56:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:56:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:56:07 PM	Tube furnace set to 0
9/4/2012	4:56:37 PM	H2 valve closed
9/4/2012	4:56:37 PM	BCl3 valve closed
9/4/2012	4:56:37 PM	PH3 valve closed
9/4/2012	4:56:37 PM	SiCl4 pre valve closed
9/4/2012	4:56:37 PM	SiCl4 post valve closed
9/4/2012	4:56:37 PM	Bypass valve closed
9/4/2012	4:56:37 PM	Bubbler valve closed
9/4/2012	4:56:37 PM	Helium valve opened
9/4/2012	4:56:37 PM	Main Vac valve opened
9/4/2012	4:56:37 PM	Helium MFC set to  20.000000
9/4/2012	4:56:37 PM	H2 MFC set to  0.000000
9/4/2012	4:56:37 PM	BCl3 MFC set to  0.000000
9/4/2012	4:56:37 PM	PH3 MFC set to  0.000000
9/4/2012	4:56:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:56:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:56:37 PM	Tube furnace set to 0
9/4/2012	4:57:07 PM	Helium valve closed
9/4/2012	4:57:07 PM	H2 valve closed
9/4/2012	4:57:07 PM	BCl3 valve closed
9/4/2012	4:57:07 PM	PH3 valve closed
9/4/2012	4:57:07 PM	SiCl4 pre valve closed
9/4/2012	4:57:07 PM	SiCl4 post valve closed
9/4/2012	4:57:07 PM	Bypass valve closed
9/4/2012	4:57:07 PM	Bubbler valve closed
9/4/2012	4:57:07 PM	Main Vac valve opened
9/4/2012	4:57:07 PM	Helium MFC set to  0.000000
9/4/2012	4:57:07 PM	H2 MFC set to  0.000000
9/4/2012	4:57:07 PM	BCl3 MFC set to  0.000000
9/4/2012	4:57:07 PM	PH3 MFC set to  0.000000
9/4/2012	4:57:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:57:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:57:07 PM	Tube furnace set to 0
9/4/2012	4:57:37 PM	H2 valve closed
9/4/2012	4:57:37 PM	BCl3 valve closed
9/4/2012	4:57:37 PM	PH3 valve closed
9/4/2012	4:57:37 PM	SiCl4 pre valve closed
9/4/2012	4:57:37 PM	SiCl4 post valve closed
9/4/2012	4:57:37 PM	Bypass valve closed
9/4/2012	4:57:37 PM	Bubbler valve closed
9/4/2012	4:57:37 PM	Helium valve opened
9/4/2012	4:57:37 PM	Main Vac valve opened
9/4/2012	4:57:37 PM	Helium MFC set to  20.000000
9/4/2012	4:57:37 PM	H2 MFC set to  0.000000
9/4/2012	4:57:37 PM	BCl3 MFC set to  0.000000
9/4/2012	4:57:37 PM	PH3 MFC set to  0.000000
9/4/2012	4:57:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:57:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:57:37 PM	Tube furnace set to 0
9/4/2012	4:58:07 PM	Helium valve closed
9/4/2012	4:58:07 PM	H2 valve closed
9/4/2012	4:58:07 PM	BCl3 valve closed
9/4/2012	4:58:07 PM	PH3 valve closed
9/4/2012	4:58:07 PM	SiCl4 pre valve closed
9/4/2012	4:58:07 PM	SiCl4 post valve closed
9/4/2012	4:58:07 PM	Bypass valve closed
9/4/2012	4:58:07 PM	Bubbler valve closed
9/4/2012	4:58:07 PM	Main Vac valve opened
9/4/2012	4:58:07 PM	Helium MFC set to  0.000000
9/4/2012	4:58:07 PM	H2 MFC set to  0.000000
9/4/2012	4:58:07 PM	BCl3 MFC set to  0.000000
9/4/2012	4:58:07 PM	PH3 MFC set to  0.000000
9/4/2012	4:58:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:58:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:58:08 PM	Tube furnace set to 0
9/4/2012	4:58:38 PM	H2 valve closed
9/4/2012	4:58:38 PM	BCl3 valve closed
9/4/2012	4:58:38 PM	PH3 valve closed
9/4/2012	4:58:38 PM	SiCl4 pre valve closed
9/4/2012	4:58:38 PM	SiCl4 post valve closed
9/4/2012	4:58:38 PM	Bypass valve closed
9/4/2012	4:58:38 PM	Bubbler valve closed
9/4/2012	4:58:38 PM	Helium valve opened
9/4/2012	4:58:38 PM	Main Vac valve opened
9/4/2012	4:58:38 PM	Helium MFC set to  20.000000
9/4/2012	4:58:38 PM	H2 MFC set to  0.000000
9/4/2012	4:58:38 PM	BCl3 MFC set to  0.000000
9/4/2012	4:58:38 PM	PH3 MFC set to  0.000000
9/4/2012	4:58:38 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:58:38 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:58:38 PM	Tube furnace set to 0
9/4/2012	4:59:08 PM	Helium valve closed
9/4/2012	4:59:08 PM	H2 valve closed
9/4/2012	4:59:08 PM	BCl3 valve closed
9/4/2012	4:59:08 PM	PH3 valve closed
9/4/2012	4:59:08 PM	SiCl4 pre valve closed
9/4/2012	4:59:08 PM	SiCl4 post valve closed
9/4/2012	4:59:08 PM	Bypass valve closed
9/4/2012	4:59:08 PM	Bubbler valve closed
9/4/2012	4:59:08 PM	Main Vac valve opened
9/4/2012	4:59:08 PM	Helium MFC set to  0.000000
9/4/2012	4:59:08 PM	H2 MFC set to  0.000000
9/4/2012	4:59:08 PM	BCl3 MFC set to  0.000000
9/4/2012	4:59:08 PM	PH3 MFC set to  0.000000
9/4/2012	4:59:08 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:59:08 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:59:08 PM	Tube furnace set to 0
9/4/2012	4:59:38 PM	H2 valve closed
9/4/2012	4:59:38 PM	BCl3 valve closed
9/4/2012	4:59:38 PM	PH3 valve closed
9/4/2012	4:59:38 PM	SiCl4 pre valve closed
9/4/2012	4:59:38 PM	SiCl4 post valve closed
9/4/2012	4:59:38 PM	Bypass valve closed
9/4/2012	4:59:38 PM	Bubbler valve closed
9/4/2012	4:59:38 PM	Helium valve opened
9/4/2012	4:59:38 PM	Main Vac valve opened
9/4/2012	4:59:38 PM	Helium MFC set to  20.000000
9/4/2012	4:59:38 PM	H2 MFC set to  0.000000
9/4/2012	4:59:38 PM	BCl3 MFC set to  0.000000
9/4/2012	4:59:38 PM	PH3 MFC set to  0.000000
9/4/2012	4:59:38 PM	SiCl4 MFC set to  0.000000
9/4/2012	4:59:38 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	4:59:38 PM	Tube furnace set to 0
9/4/2012	5:00:08 PM	Helium valve closed
9/4/2012	5:00:08 PM	H2 valve closed
9/4/2012	5:00:08 PM	BCl3 valve closed
9/4/2012	5:00:08 PM	PH3 valve closed
9/4/2012	5:00:08 PM	SiCl4 pre valve closed
9/4/2012	5:00:08 PM	SiCl4 post valve closed
9/4/2012	5:00:08 PM	Bypass valve closed
9/4/2012	5:00:08 PM	Bubbler valve closed
9/4/2012	5:00:08 PM	Main Vac valve opened
9/4/2012	5:00:08 PM	Helium MFC set to  0.000000
9/4/2012	5:00:08 PM	H2 MFC set to  0.000000
9/4/2012	5:00:08 PM	BCl3 MFC set to  0.000000
9/4/2012	5:00:08 PM	PH3 MFC set to  0.000000
9/4/2012	5:00:08 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:00:08 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:00:09 PM	Tube furnace set to 0
9/4/2012	5:00:39 PM	H2 valve closed
9/4/2012	5:00:39 PM	BCl3 valve closed
9/4/2012	5:00:39 PM	PH3 valve closed
9/4/2012	5:00:39 PM	SiCl4 pre valve closed
9/4/2012	5:00:39 PM	SiCl4 post valve closed
9/4/2012	5:00:39 PM	Bypass valve closed
9/4/2012	5:00:39 PM	Bubbler valve closed
9/4/2012	5:00:39 PM	Helium valve opened
9/4/2012	5:00:39 PM	Main Vac valve opened
9/4/2012	5:00:39 PM	Helium MFC set to  20.000000
9/4/2012	5:00:39 PM	H2 MFC set to  0.000000
9/4/2012	5:00:39 PM	BCl3 MFC set to  0.000000
9/4/2012	5:00:39 PM	PH3 MFC set to  0.000000
9/4/2012	5:00:39 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:00:39 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:00:39 PM	Tube furnace set to 0
9/4/2012	5:01:09 PM	Helium valve closed
9/4/2012	5:01:09 PM	H2 valve closed
9/4/2012	5:01:09 PM	BCl3 valve closed
9/4/2012	5:01:09 PM	PH3 valve closed
9/4/2012	5:01:09 PM	SiCl4 pre valve closed
9/4/2012	5:01:09 PM	SiCl4 post valve closed
9/4/2012	5:01:09 PM	Bypass valve closed
9/4/2012	5:01:09 PM	Bubbler valve closed
9/4/2012	5:01:09 PM	Main Vac valve opened
9/4/2012	5:01:09 PM	Helium MFC set to  0.000000
9/4/2012	5:01:09 PM	H2 MFC set to  0.000000
9/4/2012	5:01:09 PM	BCl3 MFC set to  0.000000
9/4/2012	5:01:09 PM	PH3 MFC set to  0.000000
9/4/2012	5:01:09 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:01:09 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:01:09 PM	Tube furnace set to 0
9/4/2012	5:01:10 PM	Run finished at 5:01 PM
9/4/2012	5:01:10 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:02:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:02:57 PM	Recipe started at 5:02 PM
9/4/2012	5:02:57 PM	Helium valve closed
9/4/2012	5:02:57 PM	H2 valve closed
9/4/2012	5:02:57 PM	BCl3 valve closed
9/4/2012	5:02:57 PM	PH3 valve closed
9/4/2012	5:02:57 PM	SiCl4 pre valve closed
9/4/2012	5:02:57 PM	SiCl4 post valve closed
9/4/2012	5:02:57 PM	Main Vac valve closed
9/4/2012	5:02:57 PM	Bubbler valve closed
9/4/2012	5:02:57 PM	Bypass valve opened
9/4/2012	5:02:57 PM	Helium MFC set to  0.000000
9/4/2012	5:02:57 PM	H2 MFC set to  0.000000
9/4/2012	5:02:57 PM	BCl3 MFC set to  0.000000
9/4/2012	5:02:57 PM	PH3 MFC set to  0.000000
9/4/2012	5:02:57 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:02:57 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:02:58 PM	Tube furnace set to 0
9/4/2012	5:02:58 PM	Helium valve closed
9/4/2012	5:02:58 PM	H2 valve closed
9/4/2012	5:02:58 PM	BCl3 valve closed
9/4/2012	5:02:58 PM	PH3 valve closed
9/4/2012	5:02:58 PM	SiCl4 pre valve closed
9/4/2012	5:02:58 PM	SiCl4 post valve closed
9/4/2012	5:02:58 PM	Main Vac valve closed
9/4/2012	5:02:58 PM	Bubbler valve closed
9/4/2012	5:02:58 PM	Bypass valve opened
9/4/2012	5:02:58 PM	Helium MFC set to  0.000000
9/4/2012	5:02:58 PM	H2 MFC set to  0.000000
9/4/2012	5:02:58 PM	BCl3 MFC set to  0.000000
9/4/2012	5:02:58 PM	PH3 MFC set to  0.000000
9/4/2012	5:02:58 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:02:58 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:02:58 PM	Tube furnace set to 0
9/4/2012	5:03:02 PM	Helium valve closed
9/4/2012	5:03:02 PM	H2 valve closed
9/4/2012	5:03:02 PM	BCl3 valve closed
9/4/2012	5:03:02 PM	PH3 valve closed
9/4/2012	5:03:02 PM	SiCl4 pre valve closed
9/4/2012	5:03:02 PM	SiCl4 post valve closed
9/4/2012	5:03:02 PM	Bypass valve closed
9/4/2012	5:03:02 PM	Bubbler valve closed
9/4/2012	5:03:02 PM	Main Vac valve opened
9/4/2012	5:03:02 PM	Helium MFC set to  0.000000
9/4/2012	5:03:02 PM	H2 MFC set to  0.000000
9/4/2012	5:03:02 PM	BCl3 MFC set to  0.000000
9/4/2012	5:03:02 PM	PH3 MFC set to  0.000000
9/4/2012	5:03:02 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:03:02 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:03:02 PM	Tube furnace set to 0
9/4/2012	5:03:03 PM	H2 valve closed
9/4/2012	5:03:03 PM	BCl3 valve closed
9/4/2012	5:03:03 PM	PH3 valve closed
9/4/2012	5:03:03 PM	SiCl4 pre valve closed
9/4/2012	5:03:03 PM	SiCl4 post valve closed
9/4/2012	5:03:03 PM	Bypass valve closed
9/4/2012	5:03:03 PM	Bubbler valve closed
9/4/2012	5:03:03 PM	Helium valve opened
9/4/2012	5:03:03 PM	Main Vac valve opened
9/4/2012	5:03:03 PM	Helium MFC set to  20.000000
9/4/2012	5:03:03 PM	H2 MFC set to  0.000000
9/4/2012	5:03:03 PM	BCl3 MFC set to  0.000000
9/4/2012	5:03:03 PM	PH3 MFC set to  0.000000
9/4/2012	5:03:03 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:03:03 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:03:03 PM	Tube furnace set to 0
9/4/2012	5:03:33 PM	Helium valve closed
9/4/2012	5:03:33 PM	H2 valve closed
9/4/2012	5:03:33 PM	BCl3 valve closed
9/4/2012	5:03:33 PM	PH3 valve closed
9/4/2012	5:03:33 PM	SiCl4 pre valve closed
9/4/2012	5:03:33 PM	SiCl4 post valve closed
9/4/2012	5:03:33 PM	Bypass valve closed
9/4/2012	5:03:33 PM	Bubbler valve closed
9/4/2012	5:03:33 PM	Main Vac valve opened
9/4/2012	5:03:33 PM	Helium MFC set to  0.000000
9/4/2012	5:03:33 PM	H2 MFC set to  0.000000
9/4/2012	5:03:33 PM	BCl3 MFC set to  0.000000
9/4/2012	5:03:33 PM	PH3 MFC set to  0.000000
9/4/2012	5:03:33 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:03:33 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:03:33 PM	Tube furnace set to 0
9/4/2012	5:04:03 PM	H2 valve closed
9/4/2012	5:04:03 PM	BCl3 valve closed
9/4/2012	5:04:03 PM	PH3 valve closed
9/4/2012	5:04:03 PM	SiCl4 pre valve closed
9/4/2012	5:04:03 PM	SiCl4 post valve closed
9/4/2012	5:04:03 PM	Bypass valve closed
9/4/2012	5:04:03 PM	Bubbler valve closed
9/4/2012	5:04:03 PM	Helium valve opened
9/4/2012	5:04:03 PM	Main Vac valve opened
9/4/2012	5:04:03 PM	Helium MFC set to  20.000000
9/4/2012	5:04:03 PM	H2 MFC set to  0.000000
9/4/2012	5:04:03 PM	BCl3 MFC set to  0.000000
9/4/2012	5:04:03 PM	PH3 MFC set to  0.000000
9/4/2012	5:04:03 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:04:03 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:04:03 PM	Tube furnace set to 0
9/4/2012	5:04:33 PM	Helium valve closed
9/4/2012	5:04:33 PM	H2 valve closed
9/4/2012	5:04:33 PM	BCl3 valve closed
9/4/2012	5:04:33 PM	PH3 valve closed
9/4/2012	5:04:33 PM	SiCl4 pre valve closed
9/4/2012	5:04:33 PM	SiCl4 post valve closed
9/4/2012	5:04:33 PM	Bypass valve closed
9/4/2012	5:04:33 PM	Bubbler valve closed
9/4/2012	5:04:33 PM	Main Vac valve opened
9/4/2012	5:04:33 PM	Helium MFC set to  0.000000
9/4/2012	5:04:33 PM	H2 MFC set to  0.000000
9/4/2012	5:04:33 PM	BCl3 MFC set to  0.000000
9/4/2012	5:04:33 PM	PH3 MFC set to  0.000000
9/4/2012	5:04:33 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:04:33 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:04:34 PM	Tube furnace set to 0
9/4/2012	5:05:04 PM	H2 valve closed
9/4/2012	5:05:04 PM	BCl3 valve closed
9/4/2012	5:05:04 PM	PH3 valve closed
9/4/2012	5:05:04 PM	SiCl4 pre valve closed
9/4/2012	5:05:04 PM	SiCl4 post valve closed
9/4/2012	5:05:04 PM	Bypass valve closed
9/4/2012	5:05:04 PM	Bubbler valve closed
9/4/2012	5:05:04 PM	Helium valve opened
9/4/2012	5:05:04 PM	Main Vac valve opened
9/4/2012	5:05:04 PM	Helium MFC set to  20.000000
9/4/2012	5:05:04 PM	H2 MFC set to  0.000000
9/4/2012	5:05:04 PM	BCl3 MFC set to  0.000000
9/4/2012	5:05:04 PM	PH3 MFC set to  0.000000
9/4/2012	5:05:04 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:05:04 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:05:04 PM	Tube furnace set to 0
9/4/2012	5:05:34 PM	Helium valve closed
9/4/2012	5:05:34 PM	H2 valve closed
9/4/2012	5:05:34 PM	BCl3 valve closed
9/4/2012	5:05:34 PM	PH3 valve closed
9/4/2012	5:05:34 PM	SiCl4 pre valve closed
9/4/2012	5:05:34 PM	SiCl4 post valve closed
9/4/2012	5:05:34 PM	Bypass valve closed
9/4/2012	5:05:34 PM	Bubbler valve closed
9/4/2012	5:05:34 PM	Main Vac valve opened
9/4/2012	5:05:34 PM	Helium MFC set to  0.000000
9/4/2012	5:05:34 PM	H2 MFC set to  0.000000
9/4/2012	5:05:34 PM	BCl3 MFC set to  0.000000
9/4/2012	5:05:34 PM	PH3 MFC set to  0.000000
9/4/2012	5:05:34 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:05:34 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:05:34 PM	Tube furnace set to 0
9/4/2012	5:06:04 PM	H2 valve closed
9/4/2012	5:06:04 PM	BCl3 valve closed
9/4/2012	5:06:04 PM	PH3 valve closed
9/4/2012	5:06:04 PM	SiCl4 pre valve closed
9/4/2012	5:06:04 PM	SiCl4 post valve closed
9/4/2012	5:06:04 PM	Bypass valve closed
9/4/2012	5:06:04 PM	Bubbler valve closed
9/4/2012	5:06:04 PM	Helium valve opened
9/4/2012	5:06:04 PM	Main Vac valve opened
9/4/2012	5:06:04 PM	Helium MFC set to  20.000000
9/4/2012	5:06:04 PM	H2 MFC set to  0.000000
9/4/2012	5:06:04 PM	BCl3 MFC set to  0.000000
9/4/2012	5:06:04 PM	PH3 MFC set to  0.000000
9/4/2012	5:06:04 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:06:04 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:06:04 PM	Tube furnace set to 0
9/4/2012	5:06:34 PM	Helium valve closed
9/4/2012	5:06:34 PM	H2 valve closed
9/4/2012	5:06:34 PM	BCl3 valve closed
9/4/2012	5:06:34 PM	PH3 valve closed
9/4/2012	5:06:34 PM	SiCl4 pre valve closed
9/4/2012	5:06:34 PM	SiCl4 post valve closed
9/4/2012	5:06:34 PM	Bypass valve closed
9/4/2012	5:06:34 PM	Bubbler valve closed
9/4/2012	5:06:34 PM	Main Vac valve opened
9/4/2012	5:06:34 PM	Helium MFC set to  0.000000
9/4/2012	5:06:34 PM	H2 MFC set to  0.000000
9/4/2012	5:06:34 PM	BCl3 MFC set to  0.000000
9/4/2012	5:06:34 PM	PH3 MFC set to  0.000000
9/4/2012	5:06:34 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:06:34 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:06:34 PM	Tube furnace set to 0
9/4/2012	5:07:04 PM	H2 valve closed
9/4/2012	5:07:04 PM	BCl3 valve closed
9/4/2012	5:07:04 PM	PH3 valve closed
9/4/2012	5:07:05 PM	SiCl4 pre valve closed
9/4/2012	5:07:05 PM	SiCl4 post valve closed
9/4/2012	5:07:05 PM	Bypass valve closed
9/4/2012	5:07:05 PM	Bubbler valve closed
9/4/2012	5:07:05 PM	Helium valve opened
9/4/2012	5:07:05 PM	Main Vac valve opened
9/4/2012	5:07:05 PM	Helium MFC set to  20.000000
9/4/2012	5:07:05 PM	H2 MFC set to  0.000000
9/4/2012	5:07:05 PM	BCl3 MFC set to  0.000000
9/4/2012	5:07:05 PM	PH3 MFC set to  0.000000
9/4/2012	5:07:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:07:05 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:07:05 PM	Tube furnace set to 0
9/4/2012	5:07:35 PM	Helium valve closed
9/4/2012	5:07:35 PM	H2 valve closed
9/4/2012	5:07:35 PM	BCl3 valve closed
9/4/2012	5:07:35 PM	PH3 valve closed
9/4/2012	5:07:35 PM	SiCl4 pre valve closed
9/4/2012	5:07:35 PM	SiCl4 post valve closed
9/4/2012	5:07:35 PM	Bypass valve closed
9/4/2012	5:07:35 PM	Bubbler valve closed
9/4/2012	5:07:35 PM	Main Vac valve opened
9/4/2012	5:07:35 PM	Helium MFC set to  0.000000
9/4/2012	5:07:35 PM	H2 MFC set to  0.000000
9/4/2012	5:07:35 PM	BCl3 MFC set to  0.000000
9/4/2012	5:07:35 PM	PH3 MFC set to  0.000000
9/4/2012	5:07:35 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:07:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:07:35 PM	Tube furnace set to 0
9/4/2012	5:08:05 PM	H2 valve closed
9/4/2012	5:08:05 PM	BCl3 valve closed
9/4/2012	5:08:05 PM	PH3 valve closed
9/4/2012	5:08:05 PM	SiCl4 pre valve closed
9/4/2012	5:08:05 PM	SiCl4 post valve closed
9/4/2012	5:08:05 PM	Bypass valve closed
9/4/2012	5:08:05 PM	Bubbler valve closed
9/4/2012	5:08:05 PM	Helium valve opened
9/4/2012	5:08:05 PM	Main Vac valve opened
9/4/2012	5:08:05 PM	Helium MFC set to  20.000000
9/4/2012	5:08:05 PM	H2 MFC set to  0.000000
9/4/2012	5:08:05 PM	BCl3 MFC set to  0.000000
9/4/2012	5:08:05 PM	PH3 MFC set to  0.000000
9/4/2012	5:08:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:08:05 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:08:05 PM	Tube furnace set to 0
9/4/2012	5:08:35 PM	Helium valve closed
9/4/2012	5:08:35 PM	H2 valve closed
9/4/2012	5:08:35 PM	BCl3 valve closed
9/4/2012	5:08:35 PM	PH3 valve closed
9/4/2012	5:08:35 PM	SiCl4 pre valve closed
9/4/2012	5:08:35 PM	SiCl4 post valve closed
9/4/2012	5:08:35 PM	Bypass valve closed
9/4/2012	5:08:35 PM	Bubbler valve closed
9/4/2012	5:08:35 PM	Main Vac valve opened
9/4/2012	5:08:35 PM	Helium MFC set to  0.000000
9/4/2012	5:08:35 PM	H2 MFC set to  0.000000
9/4/2012	5:08:35 PM	BCl3 MFC set to  0.000000
9/4/2012	5:08:35 PM	PH3 MFC set to  0.000000
9/4/2012	5:08:35 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:08:35 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:08:35 PM	Tube furnace set to 0
9/4/2012	5:09:05 PM	H2 valve closed
9/4/2012	5:09:05 PM	BCl3 valve closed
9/4/2012	5:09:05 PM	PH3 valve closed
9/4/2012	5:09:05 PM	SiCl4 pre valve closed
9/4/2012	5:09:05 PM	SiCl4 post valve closed
9/4/2012	5:09:05 PM	Bypass valve closed
9/4/2012	5:09:05 PM	Bubbler valve closed
9/4/2012	5:09:05 PM	Helium valve opened
9/4/2012	5:09:05 PM	Main Vac valve opened
9/4/2012	5:09:05 PM	Helium MFC set to  20.000000
9/4/2012	5:09:05 PM	H2 MFC set to  0.000000
9/4/2012	5:09:05 PM	BCl3 MFC set to  0.000000
9/4/2012	5:09:05 PM	PH3 MFC set to  0.000000
9/4/2012	5:09:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:09:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:09:06 PM	Tube furnace set to 0
9/4/2012	5:09:36 PM	Helium valve closed
9/4/2012	5:09:36 PM	H2 valve closed
9/4/2012	5:09:36 PM	BCl3 valve closed
9/4/2012	5:09:36 PM	PH3 valve closed
9/4/2012	5:09:36 PM	SiCl4 pre valve closed
9/4/2012	5:09:36 PM	SiCl4 post valve closed
9/4/2012	5:09:36 PM	Bypass valve closed
9/4/2012	5:09:36 PM	Bubbler valve closed
9/4/2012	5:09:36 PM	Main Vac valve opened
9/4/2012	5:09:36 PM	Helium MFC set to  0.000000
9/4/2012	5:09:36 PM	H2 MFC set to  0.000000
9/4/2012	5:09:36 PM	BCl3 MFC set to  0.000000
9/4/2012	5:09:36 PM	PH3 MFC set to  0.000000
9/4/2012	5:09:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:09:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:09:36 PM	Tube furnace set to 0
9/4/2012	5:10:06 PM	H2 valve closed
9/4/2012	5:10:06 PM	BCl3 valve closed
9/4/2012	5:10:06 PM	PH3 valve closed
9/4/2012	5:10:06 PM	SiCl4 pre valve closed
9/4/2012	5:10:06 PM	SiCl4 post valve closed
9/4/2012	5:10:06 PM	Bypass valve closed
9/4/2012	5:10:06 PM	Bubbler valve closed
9/4/2012	5:10:06 PM	Helium valve opened
9/4/2012	5:10:06 PM	Main Vac valve opened
9/4/2012	5:10:06 PM	Helium MFC set to  20.000000
9/4/2012	5:10:06 PM	H2 MFC set to  0.000000
9/4/2012	5:10:06 PM	BCl3 MFC set to  0.000000
9/4/2012	5:10:06 PM	PH3 MFC set to  0.000000
9/4/2012	5:10:06 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:10:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:10:06 PM	Tube furnace set to 0
9/4/2012	5:10:36 PM	Helium valve closed
9/4/2012	5:10:36 PM	H2 valve closed
9/4/2012	5:10:36 PM	BCl3 valve closed
9/4/2012	5:10:36 PM	PH3 valve closed
9/4/2012	5:10:36 PM	SiCl4 pre valve closed
9/4/2012	5:10:36 PM	SiCl4 post valve closed
9/4/2012	5:10:36 PM	Bypass valve closed
9/4/2012	5:10:36 PM	Bubbler valve closed
9/4/2012	5:10:36 PM	Main Vac valve opened
9/4/2012	5:10:36 PM	Helium MFC set to  0.000000
9/4/2012	5:10:36 PM	H2 MFC set to  0.000000
9/4/2012	5:10:36 PM	BCl3 MFC set to  0.000000
9/4/2012	5:10:36 PM	PH3 MFC set to  0.000000
9/4/2012	5:10:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:10:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:10:36 PM	Tube furnace set to 0
9/4/2012	5:11:06 PM	H2 valve closed
9/4/2012	5:11:06 PM	BCl3 valve closed
9/4/2012	5:11:06 PM	PH3 valve closed
9/4/2012	5:11:06 PM	SiCl4 pre valve closed
9/4/2012	5:11:06 PM	SiCl4 post valve closed
9/4/2012	5:11:06 PM	Bypass valve closed
9/4/2012	5:11:06 PM	Bubbler valve closed
9/4/2012	5:11:06 PM	Helium valve opened
9/4/2012	5:11:06 PM	Main Vac valve opened
9/4/2012	5:11:06 PM	Helium MFC set to  20.000000
9/4/2012	5:11:06 PM	H2 MFC set to  0.000000
9/4/2012	5:11:06 PM	BCl3 MFC set to  0.000000
9/4/2012	5:11:06 PM	PH3 MFC set to  0.000000
9/4/2012	5:11:06 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:11:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:11:07 PM	Tube furnace set to 0
9/4/2012	5:11:37 PM	Helium valve closed
9/4/2012	5:11:37 PM	H2 valve closed
9/4/2012	5:11:37 PM	BCl3 valve closed
9/4/2012	5:11:37 PM	PH3 valve closed
9/4/2012	5:11:37 PM	SiCl4 pre valve closed
9/4/2012	5:11:37 PM	SiCl4 post valve closed
9/4/2012	5:11:37 PM	Bypass valve closed
9/4/2012	5:11:37 PM	Bubbler valve closed
9/4/2012	5:11:37 PM	Main Vac valve opened
9/4/2012	5:11:37 PM	Helium MFC set to  0.000000
9/4/2012	5:11:37 PM	H2 MFC set to  0.000000
9/4/2012	5:11:37 PM	BCl3 MFC set to  0.000000
9/4/2012	5:11:37 PM	PH3 MFC set to  0.000000
9/4/2012	5:11:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:11:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:11:37 PM	Tube furnace set to 0
9/4/2012	5:12:07 PM	H2 valve closed
9/4/2012	5:12:07 PM	BCl3 valve closed
9/4/2012	5:12:07 PM	PH3 valve closed
9/4/2012	5:12:07 PM	SiCl4 pre valve closed
9/4/2012	5:12:07 PM	SiCl4 post valve closed
9/4/2012	5:12:07 PM	Bypass valve closed
9/4/2012	5:12:07 PM	Bubbler valve closed
9/4/2012	5:12:07 PM	Helium valve opened
9/4/2012	5:12:07 PM	Main Vac valve opened
9/4/2012	5:12:07 PM	Helium MFC set to  20.000000
9/4/2012	5:12:07 PM	H2 MFC set to  0.000000
9/4/2012	5:12:07 PM	BCl3 MFC set to  0.000000
9/4/2012	5:12:07 PM	PH3 MFC set to  0.000000
9/4/2012	5:12:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:12:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:12:07 PM	Tube furnace set to 0
9/4/2012	5:12:37 PM	Helium valve closed
9/4/2012	5:12:37 PM	H2 valve closed
9/4/2012	5:12:37 PM	BCl3 valve closed
9/4/2012	5:12:37 PM	PH3 valve closed
9/4/2012	5:12:37 PM	SiCl4 pre valve closed
9/4/2012	5:12:37 PM	SiCl4 post valve closed
9/4/2012	5:12:37 PM	Bypass valve closed
9/4/2012	5:12:37 PM	Bubbler valve closed
9/4/2012	5:12:37 PM	Main Vac valve opened
9/4/2012	5:12:37 PM	Helium MFC set to  0.000000
9/4/2012	5:12:37 PM	H2 MFC set to  0.000000
9/4/2012	5:12:37 PM	BCl3 MFC set to  0.000000
9/4/2012	5:12:37 PM	PH3 MFC set to  0.000000
9/4/2012	5:12:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:12:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:12:37 PM	Tube furnace set to 0
9/4/2012	5:12:38 PM	Run finished at 5:12 PM
9/4/2012	5:12:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:13:23 PM	Helium MFC set to  100.000000
9/4/2012	5:13:23 PM	Helium valve opened
9/4/2012	5:13:47 PM	Helium MFC set to  200.000000
9/4/2012	5:14:09 PM	Helium valve closed
9/4/2012	5:14:15 PM	Helium MFC set to  0.000000
9/4/2012	5:14:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	5:14:32 PM	Recipe started at 5:14 PM
9/4/2012	5:14:32 PM	Helium valve closed
9/4/2012	5:14:32 PM	H2 valve closed
9/4/2012	5:14:32 PM	BCl3 valve closed
9/4/2012	5:14:32 PM	PH3 valve closed
9/4/2012	5:14:32 PM	SiCl4 pre valve closed
9/4/2012	5:14:32 PM	SiCl4 post valve closed
9/4/2012	5:14:32 PM	Main Vac valve closed
9/4/2012	5:14:32 PM	Bypass valve closed
9/4/2012	5:14:32 PM	Bubbler valve closed
9/4/2012	5:14:32 PM	Helium MFC set to  0.000000
9/4/2012	5:14:32 PM	H2 MFC set to  0.000000
9/4/2012	5:14:32 PM	BCl3 MFC set to  0.000000
9/4/2012	5:14:32 PM	PH3 MFC set to  0.000000
9/4/2012	5:14:32 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:14:32 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:14:33 PM	Tube furnace set to 0
9/4/2012	5:14:36 PM	H2 valve closed
9/4/2012	5:14:36 PM	BCl3 valve closed
9/4/2012	5:14:36 PM	PH3 valve closed
9/4/2012	5:14:36 PM	SiCl4 pre valve closed
9/4/2012	5:14:36 PM	SiCl4 post valve closed
9/4/2012	5:14:36 PM	Main Vac valve closed
9/4/2012	5:14:36 PM	Bypass valve closed
9/4/2012	5:14:36 PM	Bubbler valve closed
9/4/2012	5:14:36 PM	Helium valve opened
9/4/2012	5:14:36 PM	Helium MFC set to  500.000000
9/4/2012	5:14:36 PM	H2 MFC set to  0.000000
9/4/2012	5:14:36 PM	BCl3 MFC set to  0.000000
9/4/2012	5:14:36 PM	PH3 MFC set to  0.000000
9/4/2012	5:14:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:14:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:14:36 PM	Tube furnace set to 0
9/4/2012	5:15:29 PM	Run aborted at 5:15 PM
9/4/2012	5:15:29 PM	Helium valve closed
9/4/2012	5:15:29 PM	H2 valve closed
9/4/2012	5:15:29 PM	BCl3 valve closed
9/4/2012	5:15:29 PM	PH3 valve closed
9/4/2012	5:15:29 PM	SiCl4 pre valve closed
9/4/2012	5:15:29 PM	SiCl4 post valve closed
9/4/2012	5:15:29 PM	Bypass valve closed
9/4/2012	5:15:29 PM	Main Vac valve closed
9/4/2012	5:15:29 PM	Bubbler valve closed
9/4/2012	5:15:29 PM	Helium MFC set to  0.000000
9/4/2012	5:15:29 PM	H2 MFC set to  0.000000
9/4/2012	5:15:29 PM	BCl3 MFC set to  0.000000
9/4/2012	5:15:29 PM	PH3 MFC set to  0.000000
9/4/2012	5:15:29 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:15:29 PM	Tube furnace set to 0
9/4/2012	5:15:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	5:15:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	5:15:32 PM	Recipe started at 5:15 PM
9/4/2012	5:15:32 PM	Helium valve closed
9/4/2012	5:15:32 PM	H2 valve closed
9/4/2012	5:15:32 PM	BCl3 valve closed
9/4/2012	5:15:32 PM	PH3 valve closed
9/4/2012	5:15:32 PM	SiCl4 pre valve closed
9/4/2012	5:15:32 PM	SiCl4 post valve closed
9/4/2012	5:15:32 PM	Main Vac valve closed
9/4/2012	5:15:32 PM	Bubbler valve closed
9/4/2012	5:15:32 PM	Bypass valve opened
9/4/2012	5:15:32 PM	Helium MFC set to  0.000000
9/4/2012	5:15:32 PM	H2 MFC set to  0.000000
9/4/2012	5:15:32 PM	BCl3 MFC set to  0.000000
9/4/2012	5:15:32 PM	PH3 MFC set to  0.000000
9/4/2012	5:15:32 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:15:32 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:15:33 PM	Tube furnace set to 0
9/4/2012	5:16:36 PM	Helium valve closed
9/4/2012	5:16:36 PM	H2 valve closed
9/4/2012	5:16:36 PM	BCl3 valve closed
9/4/2012	5:16:36 PM	PH3 valve closed
9/4/2012	5:16:36 PM	SiCl4 pre valve closed
9/4/2012	5:16:36 PM	SiCl4 post valve closed
9/4/2012	5:16:36 PM	Main Vac valve closed
9/4/2012	5:16:36 PM	Bubbler valve closed
9/4/2012	5:16:36 PM	Bypass valve opened
9/4/2012	5:16:36 PM	Helium MFC set to  0.000000
9/4/2012	5:16:36 PM	H2 MFC set to  0.000000
9/4/2012	5:16:36 PM	BCl3 MFC set to  0.000000
9/4/2012	5:16:36 PM	PH3 MFC set to  0.000000
9/4/2012	5:16:36 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:16:36 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:16:37 PM	Tube furnace set to 0
9/4/2012	5:17:37 PM	Helium valve closed
9/4/2012	5:17:37 PM	H2 valve closed
9/4/2012	5:17:37 PM	BCl3 valve closed
9/4/2012	5:17:37 PM	PH3 valve closed
9/4/2012	5:17:37 PM	SiCl4 pre valve closed
9/4/2012	5:17:37 PM	SiCl4 post valve closed
9/4/2012	5:17:37 PM	Bypass valve closed
9/4/2012	5:17:37 PM	Bubbler valve closed
9/4/2012	5:17:37 PM	Main Vac valve opened
9/4/2012	5:17:37 PM	Helium MFC set to  0.000000
9/4/2012	5:17:37 PM	H2 MFC set to  0.000000
9/4/2012	5:17:37 PM	BCl3 MFC set to  0.000000
9/4/2012	5:17:37 PM	PH3 MFC set to  0.000000
9/4/2012	5:17:37 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:17:37 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:17:37 PM	Tube furnace set to 0
9/4/2012	5:17:38 PM	Run finished at 5:17 PM
9/4/2012	5:17:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	5:20:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:20:17 PM	Recipe started at 5:20 PM
9/4/2012	5:20:17 PM	Helium valve closed
9/4/2012	5:20:17 PM	H2 valve closed
9/4/2012	5:20:17 PM	BCl3 valve closed
9/4/2012	5:20:17 PM	PH3 valve closed
9/4/2012	5:20:17 PM	SiCl4 pre valve closed
9/4/2012	5:20:17 PM	SiCl4 post valve closed
9/4/2012	5:20:17 PM	Main Vac valve closed
9/4/2012	5:20:17 PM	Bubbler valve closed
9/4/2012	5:20:17 PM	Bypass valve opened
9/4/2012	5:20:17 PM	Helium MFC set to  0.000000
9/4/2012	5:20:17 PM	H2 MFC set to  0.000000
9/4/2012	5:20:17 PM	BCl3 MFC set to  0.000000
9/4/2012	5:20:17 PM	PH3 MFC set to  0.000000
9/4/2012	5:20:17 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:20:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:20:17 PM	Tube furnace set to 0
9/4/2012	5:20:17 PM	Helium valve closed
9/4/2012	5:20:17 PM	H2 valve closed
9/4/2012	5:20:17 PM	BCl3 valve closed
9/4/2012	5:20:17 PM	PH3 valve closed
9/4/2012	5:20:17 PM	SiCl4 pre valve closed
9/4/2012	5:20:17 PM	SiCl4 post valve closed
9/4/2012	5:20:17 PM	Main Vac valve closed
9/4/2012	5:20:17 PM	Bubbler valve closed
9/4/2012	5:20:17 PM	Bypass valve opened
9/4/2012	5:20:17 PM	Helium MFC set to  0.000000
9/4/2012	5:20:17 PM	H2 MFC set to  0.000000
9/4/2012	5:20:17 PM	BCl3 MFC set to  0.000000
9/4/2012	5:20:17 PM	PH3 MFC set to  0.000000
9/4/2012	5:20:17 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:20:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:20:17 PM	Tube furnace set to 0
9/4/2012	5:20:20 PM	Helium valve closed
9/4/2012	5:20:20 PM	H2 valve closed
9/4/2012	5:20:20 PM	BCl3 valve closed
9/4/2012	5:20:20 PM	PH3 valve closed
9/4/2012	5:20:20 PM	SiCl4 pre valve closed
9/4/2012	5:20:20 PM	SiCl4 post valve closed
9/4/2012	5:20:20 PM	Bypass valve closed
9/4/2012	5:20:20 PM	Bubbler valve closed
9/4/2012	5:20:20 PM	Main Vac valve opened
9/4/2012	5:20:20 PM	Helium MFC set to  0.000000
9/4/2012	5:20:20 PM	H2 MFC set to  0.000000
9/4/2012	5:20:20 PM	BCl3 MFC set to  0.000000
9/4/2012	5:20:20 PM	PH3 MFC set to  0.000000
9/4/2012	5:20:20 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:20:20 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:20:20 PM	Tube furnace set to 0
9/4/2012	5:20:21 PM	H2 valve closed
9/4/2012	5:20:21 PM	BCl3 valve closed
9/4/2012	5:20:21 PM	PH3 valve closed
9/4/2012	5:20:21 PM	SiCl4 pre valve closed
9/4/2012	5:20:21 PM	SiCl4 post valve closed
9/4/2012	5:20:21 PM	Bypass valve closed
9/4/2012	5:20:21 PM	Bubbler valve closed
9/4/2012	5:20:21 PM	Helium valve opened
9/4/2012	5:20:21 PM	Main Vac valve opened
9/4/2012	5:20:21 PM	Helium MFC set to  20.000000
9/4/2012	5:20:21 PM	H2 MFC set to  0.000000
9/4/2012	5:20:21 PM	BCl3 MFC set to  0.000000
9/4/2012	5:20:21 PM	PH3 MFC set to  0.000000
9/4/2012	5:20:21 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:20:21 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:20:21 PM	Tube furnace set to 0
9/4/2012	5:20:51 PM	Helium valve closed
9/4/2012	5:20:51 PM	H2 valve closed
9/4/2012	5:20:51 PM	BCl3 valve closed
9/4/2012	5:20:51 PM	PH3 valve closed
9/4/2012	5:20:51 PM	SiCl4 pre valve closed
9/4/2012	5:20:51 PM	SiCl4 post valve closed
9/4/2012	5:20:51 PM	Bypass valve closed
9/4/2012	5:20:51 PM	Bubbler valve closed
9/4/2012	5:20:51 PM	Main Vac valve opened
9/4/2012	5:20:51 PM	Helium MFC set to  0.000000
9/4/2012	5:20:51 PM	H2 MFC set to  0.000000
9/4/2012	5:20:51 PM	BCl3 MFC set to  0.000000
9/4/2012	5:20:51 PM	PH3 MFC set to  0.000000
9/4/2012	5:20:51 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:20:51 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:20:51 PM	Tube furnace set to 0
9/4/2012	5:21:21 PM	H2 valve closed
9/4/2012	5:21:21 PM	BCl3 valve closed
9/4/2012	5:21:21 PM	PH3 valve closed
9/4/2012	5:21:21 PM	SiCl4 pre valve closed
9/4/2012	5:21:21 PM	SiCl4 post valve closed
9/4/2012	5:21:21 PM	Bypass valve closed
9/4/2012	5:21:21 PM	Bubbler valve closed
9/4/2012	5:21:21 PM	Helium valve opened
9/4/2012	5:21:21 PM	Main Vac valve opened
9/4/2012	5:21:21 PM	Helium MFC set to  20.000000
9/4/2012	5:21:21 PM	H2 MFC set to  0.000000
9/4/2012	5:21:21 PM	BCl3 MFC set to  0.000000
9/4/2012	5:21:21 PM	PH3 MFC set to  0.000000
9/4/2012	5:21:21 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:21:21 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:21:21 PM	Tube furnace set to 0
9/4/2012	5:21:51 PM	Helium valve closed
9/4/2012	5:21:51 PM	H2 valve closed
9/4/2012	5:21:51 PM	BCl3 valve closed
9/4/2012	5:21:51 PM	PH3 valve closed
9/4/2012	5:21:51 PM	SiCl4 pre valve closed
9/4/2012	5:21:51 PM	SiCl4 post valve closed
9/4/2012	5:21:51 PM	Bypass valve closed
9/4/2012	5:21:51 PM	Bubbler valve closed
9/4/2012	5:21:51 PM	Main Vac valve opened
9/4/2012	5:21:51 PM	Helium MFC set to  0.000000
9/4/2012	5:21:51 PM	H2 MFC set to  0.000000
9/4/2012	5:21:51 PM	BCl3 MFC set to  0.000000
9/4/2012	5:21:51 PM	PH3 MFC set to  0.000000
9/4/2012	5:21:51 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:21:51 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:21:51 PM	Tube furnace set to 0
9/4/2012	5:22:22 PM	H2 valve closed
9/4/2012	5:22:22 PM	BCl3 valve closed
9/4/2012	5:22:22 PM	PH3 valve closed
9/4/2012	5:22:22 PM	SiCl4 pre valve closed
9/4/2012	5:22:22 PM	SiCl4 post valve closed
9/4/2012	5:22:22 PM	Bypass valve closed
9/4/2012	5:22:22 PM	Bubbler valve closed
9/4/2012	5:22:22 PM	Helium valve opened
9/4/2012	5:22:22 PM	Main Vac valve opened
9/4/2012	5:22:22 PM	Helium MFC set to  20.000000
9/4/2012	5:22:22 PM	H2 MFC set to  0.000000
9/4/2012	5:22:22 PM	BCl3 MFC set to  0.000000
9/4/2012	5:22:22 PM	PH3 MFC set to  0.000000
9/4/2012	5:22:22 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:22:22 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:22:22 PM	Tube furnace set to 0
9/4/2012	5:22:52 PM	Helium valve closed
9/4/2012	5:22:52 PM	H2 valve closed
9/4/2012	5:22:52 PM	BCl3 valve closed
9/4/2012	5:22:52 PM	PH3 valve closed
9/4/2012	5:22:52 PM	SiCl4 pre valve closed
9/4/2012	5:22:52 PM	SiCl4 post valve closed
9/4/2012	5:22:52 PM	Bypass valve closed
9/4/2012	5:22:52 PM	Bubbler valve closed
9/4/2012	5:22:52 PM	Main Vac valve opened
9/4/2012	5:22:52 PM	Helium MFC set to  0.000000
9/4/2012	5:22:52 PM	H2 MFC set to  0.000000
9/4/2012	5:22:52 PM	BCl3 MFC set to  0.000000
9/4/2012	5:22:52 PM	PH3 MFC set to  0.000000
9/4/2012	5:22:52 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:22:52 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:22:52 PM	Tube furnace set to 0
9/4/2012	5:23:22 PM	H2 valve closed
9/4/2012	5:23:22 PM	BCl3 valve closed
9/4/2012	5:23:22 PM	PH3 valve closed
9/4/2012	5:23:22 PM	SiCl4 pre valve closed
9/4/2012	5:23:22 PM	SiCl4 post valve closed
9/4/2012	5:23:22 PM	Bypass valve closed
9/4/2012	5:23:22 PM	Bubbler valve closed
9/4/2012	5:23:22 PM	Helium valve opened
9/4/2012	5:23:22 PM	Main Vac valve opened
9/4/2012	5:23:22 PM	Helium MFC set to  20.000000
9/4/2012	5:23:22 PM	H2 MFC set to  0.000000
9/4/2012	5:23:22 PM	BCl3 MFC set to  0.000000
9/4/2012	5:23:22 PM	PH3 MFC set to  0.000000
9/4/2012	5:23:22 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:23:22 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:23:22 PM	Tube furnace set to 0
9/4/2012	5:23:52 PM	Helium valve closed
9/4/2012	5:23:52 PM	H2 valve closed
9/4/2012	5:23:52 PM	BCl3 valve closed
9/4/2012	5:23:52 PM	PH3 valve closed
9/4/2012	5:23:52 PM	SiCl4 pre valve closed
9/4/2012	5:23:52 PM	SiCl4 post valve closed
9/4/2012	5:23:52 PM	Bypass valve closed
9/4/2012	5:23:52 PM	Bubbler valve closed
9/4/2012	5:23:52 PM	Main Vac valve opened
9/4/2012	5:23:52 PM	Helium MFC set to  0.000000
9/4/2012	5:23:52 PM	H2 MFC set to  0.000000
9/4/2012	5:23:52 PM	BCl3 MFC set to  0.000000
9/4/2012	5:23:52 PM	PH3 MFC set to  0.000000
9/4/2012	5:23:52 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:23:52 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:23:52 PM	Tube furnace set to 0
9/4/2012	5:24:22 PM	H2 valve closed
9/4/2012	5:24:22 PM	BCl3 valve closed
9/4/2012	5:24:22 PM	PH3 valve closed
9/4/2012	5:24:22 PM	SiCl4 pre valve closed
9/4/2012	5:24:22 PM	SiCl4 post valve closed
9/4/2012	5:24:22 PM	Bypass valve closed
9/4/2012	5:24:22 PM	Bubbler valve closed
9/4/2012	5:24:22 PM	Helium valve opened
9/4/2012	5:24:22 PM	Main Vac valve opened
9/4/2012	5:24:22 PM	Helium MFC set to  20.000000
9/4/2012	5:24:23 PM	H2 MFC set to  0.000000
9/4/2012	5:24:23 PM	BCl3 MFC set to  0.000000
9/4/2012	5:24:23 PM	PH3 MFC set to  0.000000
9/4/2012	5:24:23 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:24:23 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:24:23 PM	Tube furnace set to 0
9/4/2012	5:24:53 PM	Helium valve closed
9/4/2012	5:24:53 PM	H2 valve closed
9/4/2012	5:24:53 PM	BCl3 valve closed
9/4/2012	5:24:53 PM	PH3 valve closed
9/4/2012	5:24:53 PM	SiCl4 pre valve closed
9/4/2012	5:24:53 PM	SiCl4 post valve closed
9/4/2012	5:24:53 PM	Bypass valve closed
9/4/2012	5:24:53 PM	Bubbler valve closed
9/4/2012	5:24:53 PM	Main Vac valve opened
9/4/2012	5:24:53 PM	Helium MFC set to  0.000000
9/4/2012	5:24:53 PM	H2 MFC set to  0.000000
9/4/2012	5:24:53 PM	BCl3 MFC set to  0.000000
9/4/2012	5:24:53 PM	PH3 MFC set to  0.000000
9/4/2012	5:24:53 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:24:53 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:24:53 PM	Tube furnace set to 0
9/4/2012	5:25:23 PM	H2 valve closed
9/4/2012	5:25:23 PM	BCl3 valve closed
9/4/2012	5:25:23 PM	PH3 valve closed
9/4/2012	5:25:23 PM	SiCl4 pre valve closed
9/4/2012	5:25:23 PM	SiCl4 post valve closed
9/4/2012	5:25:23 PM	Bypass valve closed
9/4/2012	5:25:23 PM	Bubbler valve closed
9/4/2012	5:25:23 PM	Helium valve opened
9/4/2012	5:25:23 PM	Main Vac valve opened
9/4/2012	5:25:23 PM	Helium MFC set to  20.000000
9/4/2012	5:25:23 PM	H2 MFC set to  0.000000
9/4/2012	5:25:23 PM	BCl3 MFC set to  0.000000
9/4/2012	5:25:23 PM	PH3 MFC set to  0.000000
9/4/2012	5:25:23 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:25:23 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:25:23 PM	Tube furnace set to 0
9/4/2012	5:25:53 PM	Helium valve closed
9/4/2012	5:25:53 PM	H2 valve closed
9/4/2012	5:25:53 PM	BCl3 valve closed
9/4/2012	5:25:53 PM	PH3 valve closed
9/4/2012	5:25:53 PM	SiCl4 pre valve closed
9/4/2012	5:25:53 PM	SiCl4 post valve closed
9/4/2012	5:25:53 PM	Bypass valve closed
9/4/2012	5:25:53 PM	Bubbler valve closed
9/4/2012	5:25:53 PM	Main Vac valve opened
9/4/2012	5:25:53 PM	Helium MFC set to  0.000000
9/4/2012	5:25:53 PM	H2 MFC set to  0.000000
9/4/2012	5:25:53 PM	BCl3 MFC set to  0.000000
9/4/2012	5:25:53 PM	PH3 MFC set to  0.000000
9/4/2012	5:25:53 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:25:53 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:25:53 PM	Tube furnace set to 0
9/4/2012	5:26:23 PM	H2 valve closed
9/4/2012	5:26:23 PM	BCl3 valve closed
9/4/2012	5:26:23 PM	PH3 valve closed
9/4/2012	5:26:23 PM	SiCl4 pre valve closed
9/4/2012	5:26:23 PM	SiCl4 post valve closed
9/4/2012	5:26:23 PM	Bypass valve closed
9/4/2012	5:26:23 PM	Bubbler valve closed
9/4/2012	5:26:23 PM	Helium valve opened
9/4/2012	5:26:23 PM	Main Vac valve opened
9/4/2012	5:26:23 PM	Helium MFC set to  20.000000
9/4/2012	5:26:23 PM	H2 MFC set to  0.000000
9/4/2012	5:26:23 PM	BCl3 MFC set to  0.000000
9/4/2012	5:26:23 PM	PH3 MFC set to  0.000000
9/4/2012	5:26:23 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:26:23 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:26:24 PM	Tube furnace set to 0
9/4/2012	5:26:54 PM	Helium valve closed
9/4/2012	5:26:54 PM	H2 valve closed
9/4/2012	5:26:54 PM	BCl3 valve closed
9/4/2012	5:26:54 PM	PH3 valve closed
9/4/2012	5:26:54 PM	SiCl4 pre valve closed
9/4/2012	5:26:54 PM	SiCl4 post valve closed
9/4/2012	5:26:54 PM	Bypass valve closed
9/4/2012	5:26:54 PM	Bubbler valve closed
9/4/2012	5:26:54 PM	Main Vac valve opened
9/4/2012	5:26:54 PM	Helium MFC set to  0.000000
9/4/2012	5:26:54 PM	H2 MFC set to  0.000000
9/4/2012	5:26:54 PM	BCl3 MFC set to  0.000000
9/4/2012	5:26:54 PM	PH3 MFC set to  0.000000
9/4/2012	5:26:54 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:26:54 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:26:54 PM	Tube furnace set to 0
9/4/2012	5:27:24 PM	H2 valve closed
9/4/2012	5:27:24 PM	BCl3 valve closed
9/4/2012	5:27:24 PM	PH3 valve closed
9/4/2012	5:27:24 PM	SiCl4 pre valve closed
9/4/2012	5:27:24 PM	SiCl4 post valve closed
9/4/2012	5:27:24 PM	Bypass valve closed
9/4/2012	5:27:24 PM	Bubbler valve closed
9/4/2012	5:27:24 PM	Helium valve opened
9/4/2012	5:27:24 PM	Main Vac valve opened
9/4/2012	5:27:24 PM	Helium MFC set to  20.000000
9/4/2012	5:27:24 PM	H2 MFC set to  0.000000
9/4/2012	5:27:24 PM	BCl3 MFC set to  0.000000
9/4/2012	5:27:24 PM	PH3 MFC set to  0.000000
9/4/2012	5:27:24 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:27:24 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:27:24 PM	Tube furnace set to 0
9/4/2012	5:27:54 PM	Helium valve closed
9/4/2012	5:27:54 PM	H2 valve closed
9/4/2012	5:27:54 PM	BCl3 valve closed
9/4/2012	5:27:54 PM	PH3 valve closed
9/4/2012	5:27:54 PM	SiCl4 pre valve closed
9/4/2012	5:27:54 PM	SiCl4 post valve closed
9/4/2012	5:27:54 PM	Bypass valve closed
9/4/2012	5:27:54 PM	Bubbler valve closed
9/4/2012	5:27:54 PM	Main Vac valve opened
9/4/2012	5:27:54 PM	Helium MFC set to  0.000000
9/4/2012	5:27:54 PM	H2 MFC set to  0.000000
9/4/2012	5:27:54 PM	BCl3 MFC set to  0.000000
9/4/2012	5:27:54 PM	PH3 MFC set to  0.000000
9/4/2012	5:27:54 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:27:54 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:27:54 PM	Tube furnace set to 0
9/4/2012	5:28:24 PM	H2 valve closed
9/4/2012	5:28:24 PM	BCl3 valve closed
9/4/2012	5:28:24 PM	PH3 valve closed
9/4/2012	5:28:24 PM	SiCl4 pre valve closed
9/4/2012	5:28:24 PM	SiCl4 post valve closed
9/4/2012	5:28:24 PM	Bypass valve closed
9/4/2012	5:28:24 PM	Bubbler valve closed
9/4/2012	5:28:24 PM	Helium valve opened
9/4/2012	5:28:24 PM	Main Vac valve opened
9/4/2012	5:28:24 PM	Helium MFC set to  20.000000
9/4/2012	5:28:24 PM	H2 MFC set to  0.000000
9/4/2012	5:28:24 PM	BCl3 MFC set to  0.000000
9/4/2012	5:28:24 PM	PH3 MFC set to  0.000000
9/4/2012	5:28:24 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:28:24 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:28:25 PM	Tube furnace set to 0
9/4/2012	5:28:55 PM	Helium valve closed
9/4/2012	5:28:55 PM	H2 valve closed
9/4/2012	5:28:55 PM	BCl3 valve closed
9/4/2012	5:28:55 PM	PH3 valve closed
9/4/2012	5:28:55 PM	SiCl4 pre valve closed
9/4/2012	5:28:55 PM	SiCl4 post valve closed
9/4/2012	5:28:55 PM	Bypass valve closed
9/4/2012	5:28:55 PM	Bubbler valve closed
9/4/2012	5:28:55 PM	Main Vac valve opened
9/4/2012	5:28:55 PM	Helium MFC set to  0.000000
9/4/2012	5:28:55 PM	H2 MFC set to  0.000000
9/4/2012	5:28:55 PM	BCl3 MFC set to  0.000000
9/4/2012	5:28:55 PM	PH3 MFC set to  0.000000
9/4/2012	5:28:55 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:28:55 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:28:55 PM	Tube furnace set to 0
9/4/2012	5:29:25 PM	H2 valve closed
9/4/2012	5:29:25 PM	BCl3 valve closed
9/4/2012	5:29:25 PM	PH3 valve closed
9/4/2012	5:29:25 PM	SiCl4 pre valve closed
9/4/2012	5:29:25 PM	SiCl4 post valve closed
9/4/2012	5:29:25 PM	Bypass valve closed
9/4/2012	5:29:25 PM	Bubbler valve closed
9/4/2012	5:29:25 PM	Helium valve opened
9/4/2012	5:29:25 PM	Main Vac valve opened
9/4/2012	5:29:25 PM	Helium MFC set to  20.000000
9/4/2012	5:29:25 PM	H2 MFC set to  0.000000
9/4/2012	5:29:25 PM	BCl3 MFC set to  0.000000
9/4/2012	5:29:25 PM	PH3 MFC set to  0.000000
9/4/2012	5:29:25 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:29:25 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:29:25 PM	Tube furnace set to 0
9/4/2012	5:29:55 PM	Helium valve closed
9/4/2012	5:29:55 PM	H2 valve closed
9/4/2012	5:29:55 PM	BCl3 valve closed
9/4/2012	5:29:55 PM	PH3 valve closed
9/4/2012	5:29:55 PM	SiCl4 pre valve closed
9/4/2012	5:29:55 PM	SiCl4 post valve closed
9/4/2012	5:29:55 PM	Bypass valve closed
9/4/2012	5:29:55 PM	Bubbler valve closed
9/4/2012	5:29:55 PM	Main Vac valve opened
9/4/2012	5:29:55 PM	Helium MFC set to  0.000000
9/4/2012	5:29:55 PM	H2 MFC set to  0.000000
9/4/2012	5:29:55 PM	BCl3 MFC set to  0.000000
9/4/2012	5:29:55 PM	PH3 MFC set to  0.000000
9/4/2012	5:29:55 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:29:55 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:29:55 PM	Tube furnace set to 0
9/4/2012	5:29:56 PM	Run finished at 5:29 PM
9/4/2012	5:29:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:30:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	5:30:17 PM	Recipe started at 5:30 PM
9/4/2012	5:30:17 PM	Helium valve closed
9/4/2012	5:30:17 PM	H2 valve closed
9/4/2012	5:30:17 PM	BCl3 valve closed
9/4/2012	5:30:17 PM	PH3 valve closed
9/4/2012	5:30:17 PM	SiCl4 pre valve closed
9/4/2012	5:30:17 PM	SiCl4 post valve closed
9/4/2012	5:30:17 PM	Main Vac valve closed
9/4/2012	5:30:17 PM	Bypass valve closed
9/4/2012	5:30:17 PM	Bubbler valve closed
9/4/2012	5:30:17 PM	Helium MFC set to  0.000000
9/4/2012	5:30:17 PM	H2 MFC set to  0.000000
9/4/2012	5:30:17 PM	BCl3 MFC set to  0.000000
9/4/2012	5:30:17 PM	PH3 MFC set to  0.000000
9/4/2012	5:30:17 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:30:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:30:18 PM	Tube furnace set to 0
9/4/2012	5:30:21 PM	H2 valve closed
9/4/2012	5:30:21 PM	BCl3 valve closed
9/4/2012	5:30:21 PM	PH3 valve closed
9/4/2012	5:30:21 PM	SiCl4 pre valve closed
9/4/2012	5:30:21 PM	SiCl4 post valve closed
9/4/2012	5:30:21 PM	Main Vac valve closed
9/4/2012	5:30:21 PM	Bypass valve closed
9/4/2012	5:30:21 PM	Bubbler valve closed
9/4/2012	5:30:21 PM	Helium valve opened
9/4/2012	5:30:21 PM	Helium MFC set to  500.000000
9/4/2012	5:30:21 PM	H2 MFC set to  0.000000
9/4/2012	5:30:21 PM	BCl3 MFC set to  0.000000
9/4/2012	5:30:21 PM	PH3 MFC set to  0.000000
9/4/2012	5:30:21 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:30:21 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:30:21 PM	Tube furnace set to 0
9/4/2012	5:31:14 PM	Run aborted at 5:31 PM
9/4/2012	5:31:14 PM	Helium valve closed
9/4/2012	5:31:14 PM	H2 valve closed
9/4/2012	5:31:14 PM	BCl3 valve closed
9/4/2012	5:31:14 PM	PH3 valve closed
9/4/2012	5:31:14 PM	SiCl4 pre valve closed
9/4/2012	5:31:14 PM	SiCl4 post valve closed
9/4/2012	5:31:14 PM	Bypass valve closed
9/4/2012	5:31:14 PM	Main Vac valve closed
9/4/2012	5:31:14 PM	Bubbler valve closed
9/4/2012	5:31:14 PM	Helium MFC set to  0.000000
9/4/2012	5:31:14 PM	H2 MFC set to  0.000000
9/4/2012	5:31:14 PM	BCl3 MFC set to  0.000000
9/4/2012	5:31:14 PM	PH3 MFC set to  0.000000
9/4/2012	5:31:14 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:31:14 PM	Tube furnace set to 0
9/4/2012	5:31:14 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/4/2012	5:31:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	5:31:17 PM	Recipe started at 5:31 PM
9/4/2012	5:31:17 PM	Helium valve closed
9/4/2012	5:31:17 PM	H2 valve closed
9/4/2012	5:31:17 PM	BCl3 valve closed
9/4/2012	5:31:17 PM	PH3 valve closed
9/4/2012	5:31:17 PM	SiCl4 pre valve closed
9/4/2012	5:31:17 PM	SiCl4 post valve closed
9/4/2012	5:31:17 PM	Main Vac valve closed
9/4/2012	5:31:17 PM	Bubbler valve closed
9/4/2012	5:31:17 PM	Bypass valve opened
9/4/2012	5:31:17 PM	Helium MFC set to  0.000000
9/4/2012	5:31:17 PM	H2 MFC set to  0.000000
9/4/2012	5:31:17 PM	BCl3 MFC set to  0.000000
9/4/2012	5:31:17 PM	PH3 MFC set to  0.000000
9/4/2012	5:31:17 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:31:17 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:31:17 PM	Tube furnace set to 0
9/4/2012	5:32:19 PM	Helium valve closed
9/4/2012	5:32:19 PM	H2 valve closed
9/4/2012	5:32:19 PM	BCl3 valve closed
9/4/2012	5:32:19 PM	PH3 valve closed
9/4/2012	5:32:19 PM	SiCl4 pre valve closed
9/4/2012	5:32:19 PM	SiCl4 post valve closed
9/4/2012	5:32:19 PM	Main Vac valve closed
9/4/2012	5:32:19 PM	Bubbler valve closed
9/4/2012	5:32:19 PM	Bypass valve opened
9/4/2012	5:32:19 PM	Helium MFC set to  0.000000
9/4/2012	5:32:19 PM	H2 MFC set to  0.000000
9/4/2012	5:32:19 PM	BCl3 MFC set to  0.000000
9/4/2012	5:32:19 PM	PH3 MFC set to  0.000000
9/4/2012	5:32:19 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:32:19 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:32:19 PM	Tube furnace set to 0
9/4/2012	5:32:23 PM	Helium valve closed
9/4/2012	5:32:23 PM	H2 valve closed
9/4/2012	5:32:23 PM	BCl3 valve closed
9/4/2012	5:32:23 PM	PH3 valve closed
9/4/2012	5:32:23 PM	SiCl4 pre valve closed
9/4/2012	5:32:23 PM	SiCl4 post valve closed
9/4/2012	5:32:23 PM	Bypass valve closed
9/4/2012	5:32:23 PM	Bubbler valve closed
9/4/2012	5:32:23 PM	Main Vac valve opened
9/4/2012	5:32:23 PM	Helium MFC set to  0.000000
9/4/2012	5:32:23 PM	H2 MFC set to  0.000000
9/4/2012	5:32:23 PM	BCl3 MFC set to  0.000000
9/4/2012	5:32:23 PM	PH3 MFC set to  0.000000
9/4/2012	5:32:23 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:32:23 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:32:23 PM	Tube furnace set to 0
9/4/2012	5:32:24 PM	Run finished at 5:32 PM
9/4/2012	5:32:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/4/2012	5:33:53 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
9/4/2012	5:34:05 PM	Recipe started at 5:33 PM
9/4/2012	5:34:05 PM	Helium valve closed
9/4/2012	5:34:05 PM	H2 valve closed
9/4/2012	5:34:05 PM	BCl3 valve closed
9/4/2012	5:34:05 PM	PH3 valve closed
9/4/2012	5:34:05 PM	SiCl4 pre valve closed
9/4/2012	5:34:05 PM	SiCl4 post valve closed
9/4/2012	5:34:05 PM	Main Vac valve closed
9/4/2012	5:34:05 PM	Bubbler valve closed
9/4/2012	5:34:05 PM	Bypass valve opened
9/4/2012	5:34:05 PM	Helium MFC set to  0.000000
9/4/2012	5:34:05 PM	H2 MFC set to  0.000000
9/4/2012	5:34:05 PM	BCl3 MFC set to  0.000000
9/4/2012	5:34:05 PM	PH3 MFC set to  0.000000
9/4/2012	5:34:05 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:34:05 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:34:06 PM	Tube furnace set to 0
9/4/2012	5:34:06 PM	Helium valve closed
9/4/2012	5:34:06 PM	H2 valve closed
9/4/2012	5:34:06 PM	BCl3 valve closed
9/4/2012	5:34:06 PM	PH3 valve closed
9/4/2012	5:34:06 PM	SiCl4 pre valve closed
9/4/2012	5:34:06 PM	SiCl4 post valve closed
9/4/2012	5:34:06 PM	Main Vac valve closed
9/4/2012	5:34:06 PM	Bubbler valve closed
9/4/2012	5:34:06 PM	Bypass valve opened
9/4/2012	5:34:06 PM	Helium MFC set to  0.000000
9/4/2012	5:34:06 PM	H2 MFC set to  0.000000
9/4/2012	5:34:06 PM	BCl3 MFC set to  0.000000
9/4/2012	5:34:06 PM	PH3 MFC set to  0.000000
9/4/2012	5:34:06 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:34:06 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:34:06 PM	Tube furnace set to 0
9/4/2012	5:34:07 PM	Helium valve closed
9/4/2012	5:34:07 PM	H2 valve closed
9/4/2012	5:34:07 PM	BCl3 valve closed
9/4/2012	5:34:07 PM	PH3 valve closed
9/4/2012	5:34:07 PM	SiCl4 pre valve closed
9/4/2012	5:34:07 PM	SiCl4 post valve closed
9/4/2012	5:34:07 PM	Bypass valve closed
9/4/2012	5:34:07 PM	Bubbler valve closed
9/4/2012	5:34:07 PM	Main Vac valve opened
9/4/2012	5:34:07 PM	Helium MFC set to  0.000000
9/4/2012	5:34:07 PM	H2 MFC set to  0.000000
9/4/2012	5:34:07 PM	BCl3 MFC set to  0.000000
9/4/2012	5:34:07 PM	PH3 MFC set to  0.000000
9/4/2012	5:34:07 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:34:07 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:34:07 PM	Tube furnace set to 0
9/4/2012	5:34:38 PM	H2 valve closed
9/4/2012	5:34:38 PM	BCl3 valve closed
9/4/2012	5:34:38 PM	PH3 valve closed
9/4/2012	5:34:38 PM	SiCl4 pre valve closed
9/4/2012	5:34:38 PM	SiCl4 post valve closed
9/4/2012	5:34:38 PM	Bypass valve closed
9/4/2012	5:34:38 PM	Bubbler valve closed
9/4/2012	5:34:38 PM	Helium valve opened
9/4/2012	5:34:38 PM	Main Vac valve opened
9/4/2012	5:34:38 PM	Helium MFC set to  20.000000
9/4/2012	5:34:38 PM	H2 MFC set to  0.000000
9/4/2012	5:34:38 PM	BCl3 MFC set to  0.000000
9/4/2012	5:34:38 PM	PH3 MFC set to  0.000000
9/4/2012	5:34:38 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:34:38 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:34:38 PM	Tube furnace set to 0
9/4/2012	5:35:08 PM	Helium valve closed
9/4/2012	5:35:08 PM	H2 valve closed
9/4/2012	5:35:08 PM	BCl3 valve closed
9/4/2012	5:35:08 PM	PH3 valve closed
9/4/2012	5:35:08 PM	SiCl4 pre valve closed
9/4/2012	5:35:08 PM	SiCl4 post valve closed
9/4/2012	5:35:08 PM	Bypass valve closed
9/4/2012	5:35:08 PM	Bubbler valve closed
9/4/2012	5:35:08 PM	Main Vac valve opened
9/4/2012	5:35:08 PM	Helium MFC set to  0.000000
9/4/2012	5:35:08 PM	H2 MFC set to  0.000000
9/4/2012	5:35:08 PM	BCl3 MFC set to  0.000000
9/4/2012	5:35:08 PM	PH3 MFC set to  0.000000
9/4/2012	5:35:08 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:35:08 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:35:08 PM	Tube furnace set to 0
9/4/2012	5:35:38 PM	H2 valve closed
9/4/2012	5:35:38 PM	BCl3 valve closed
9/4/2012	5:35:38 PM	PH3 valve closed
9/4/2012	5:35:38 PM	SiCl4 pre valve closed
9/4/2012	5:35:38 PM	SiCl4 post valve closed
9/4/2012	5:35:38 PM	Bypass valve closed
9/4/2012	5:35:38 PM	Bubbler valve closed
9/4/2012	5:35:38 PM	Helium valve opened
9/4/2012	5:35:38 PM	Main Vac valve opened
9/4/2012	5:35:38 PM	Helium MFC set to  20.000000
9/4/2012	5:35:38 PM	H2 MFC set to  0.000000
9/4/2012	5:35:38 PM	BCl3 MFC set to  0.000000
9/4/2012	5:35:38 PM	PH3 MFC set to  0.000000
9/4/2012	5:35:38 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:35:38 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:35:38 PM	Tube furnace set to 0
9/4/2012	5:36:08 PM	Helium valve closed
9/4/2012	5:36:08 PM	H2 valve closed
9/4/2012	5:36:08 PM	BCl3 valve closed
9/4/2012	5:36:08 PM	PH3 valve closed
9/4/2012	5:36:08 PM	SiCl4 pre valve closed
9/4/2012	5:36:08 PM	SiCl4 post valve closed
9/4/2012	5:36:08 PM	Bypass valve closed
9/4/2012	5:36:08 PM	Bubbler valve closed
9/4/2012	5:36:08 PM	Main Vac valve opened
9/4/2012	5:36:08 PM	Helium MFC set to  0.000000
9/4/2012	5:36:08 PM	H2 MFC set to  0.000000
9/4/2012	5:36:08 PM	BCl3 MFC set to  0.000000
9/4/2012	5:36:08 PM	PH3 MFC set to  0.000000
9/4/2012	5:36:08 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:36:08 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:36:08 PM	Tube furnace set to 0
9/4/2012	5:36:38 PM	H2 valve closed
9/4/2012	5:36:38 PM	BCl3 valve closed
9/4/2012	5:36:38 PM	PH3 valve closed
9/4/2012	5:36:38 PM	SiCl4 pre valve closed
9/4/2012	5:36:38 PM	SiCl4 post valve closed
9/4/2012	5:36:38 PM	Bypass valve closed
9/4/2012	5:36:38 PM	Bubbler valve closed
9/4/2012	5:36:39 PM	Helium valve opened
9/4/2012	5:36:39 PM	Main Vac valve opened
9/4/2012	5:36:39 PM	Helium MFC set to  20.000000
9/4/2012	5:36:39 PM	H2 MFC set to  0.000000
9/4/2012	5:36:39 PM	BCl3 MFC set to  0.000000
9/4/2012	5:36:39 PM	PH3 MFC set to  0.000000
9/4/2012	5:36:39 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:36:39 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:36:39 PM	Tube furnace set to 0
9/4/2012	5:37:09 PM	Helium valve closed
9/4/2012	5:37:09 PM	H2 valve closed
9/4/2012	5:37:09 PM	BCl3 valve closed
9/4/2012	5:37:09 PM	PH3 valve closed
9/4/2012	5:37:09 PM	SiCl4 pre valve closed
9/4/2012	5:37:09 PM	SiCl4 post valve closed
9/4/2012	5:37:09 PM	Bypass valve closed
9/4/2012	5:37:09 PM	Bubbler valve closed
9/4/2012	5:37:09 PM	Main Vac valve opened
9/4/2012	5:37:09 PM	Helium MFC set to  0.000000
9/4/2012	5:37:09 PM	H2 MFC set to  0.000000
9/4/2012	5:37:09 PM	BCl3 MFC set to  0.000000
9/4/2012	5:37:09 PM	PH3 MFC set to  0.000000
9/4/2012	5:37:09 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:37:09 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:37:09 PM	Tube furnace set to 0
9/4/2012	5:37:39 PM	H2 valve closed
9/4/2012	5:37:39 PM	BCl3 valve closed
9/4/2012	5:37:39 PM	PH3 valve closed
9/4/2012	5:37:39 PM	SiCl4 pre valve closed
9/4/2012	5:37:39 PM	SiCl4 post valve closed
9/4/2012	5:37:39 PM	Bypass valve closed
9/4/2012	5:37:39 PM	Bubbler valve closed
9/4/2012	5:37:39 PM	Helium valve opened
9/4/2012	5:37:39 PM	Main Vac valve opened
9/4/2012	5:37:39 PM	Helium MFC set to  20.000000
9/4/2012	5:37:39 PM	H2 MFC set to  0.000000
9/4/2012	5:37:39 PM	BCl3 MFC set to  0.000000
9/4/2012	5:37:39 PM	PH3 MFC set to  0.000000
9/4/2012	5:37:39 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:37:39 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:37:39 PM	Tube furnace set to 0
9/4/2012	5:38:09 PM	Helium valve closed
9/4/2012	5:38:09 PM	H2 valve closed
9/4/2012	5:38:09 PM	BCl3 valve closed
9/4/2012	5:38:09 PM	PH3 valve closed
9/4/2012	5:38:09 PM	SiCl4 pre valve closed
9/4/2012	5:38:09 PM	SiCl4 post valve closed
9/4/2012	5:38:09 PM	Bypass valve closed
9/4/2012	5:38:09 PM	Bubbler valve closed
9/4/2012	5:38:09 PM	Main Vac valve opened
9/4/2012	5:38:09 PM	Helium MFC set to  0.000000
9/4/2012	5:38:09 PM	H2 MFC set to  0.000000
9/4/2012	5:38:09 PM	BCl3 MFC set to  0.000000
9/4/2012	5:38:09 PM	PH3 MFC set to  0.000000
9/4/2012	5:38:09 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:38:09 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:38:09 PM	Tube furnace set to 0
9/4/2012	5:38:39 PM	H2 valve closed
9/4/2012	5:38:39 PM	BCl3 valve closed
9/4/2012	5:38:39 PM	PH3 valve closed
9/4/2012	5:38:39 PM	SiCl4 pre valve closed
9/4/2012	5:38:39 PM	SiCl4 post valve closed
9/4/2012	5:38:39 PM	Bypass valve closed
9/4/2012	5:38:39 PM	Bubbler valve closed
9/4/2012	5:38:39 PM	Helium valve opened
9/4/2012	5:38:39 PM	Main Vac valve opened
9/4/2012	5:38:39 PM	Helium MFC set to  20.000000
9/4/2012	5:38:39 PM	H2 MFC set to  0.000000
9/4/2012	5:38:39 PM	BCl3 MFC set to  0.000000
9/4/2012	5:38:39 PM	PH3 MFC set to  0.000000
9/4/2012	5:38:39 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:38:39 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:38:40 PM	Tube furnace set to 0
9/4/2012	5:39:10 PM	Helium valve closed
9/4/2012	5:39:10 PM	H2 valve closed
9/4/2012	5:39:10 PM	BCl3 valve closed
9/4/2012	5:39:10 PM	PH3 valve closed
9/4/2012	5:39:10 PM	SiCl4 pre valve closed
9/4/2012	5:39:10 PM	SiCl4 post valve closed
9/4/2012	5:39:10 PM	Bypass valve closed
9/4/2012	5:39:10 PM	Bubbler valve closed
9/4/2012	5:39:10 PM	Main Vac valve opened
9/4/2012	5:39:10 PM	Helium MFC set to  0.000000
9/4/2012	5:39:10 PM	H2 MFC set to  0.000000
9/4/2012	5:39:10 PM	BCl3 MFC set to  0.000000
9/4/2012	5:39:10 PM	PH3 MFC set to  0.000000
9/4/2012	5:39:10 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:39:10 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:39:10 PM	Tube furnace set to 0
9/4/2012	5:39:40 PM	H2 valve closed
9/4/2012	5:39:40 PM	BCl3 valve closed
9/4/2012	5:39:40 PM	PH3 valve closed
9/4/2012	5:39:40 PM	SiCl4 pre valve closed
9/4/2012	5:39:40 PM	SiCl4 post valve closed
9/4/2012	5:39:40 PM	Bypass valve closed
9/4/2012	5:39:40 PM	Bubbler valve closed
9/4/2012	5:39:40 PM	Helium valve opened
9/4/2012	5:39:40 PM	Main Vac valve opened
9/4/2012	5:39:40 PM	Helium MFC set to  20.000000
9/4/2012	5:39:40 PM	H2 MFC set to  0.000000
9/4/2012	5:39:40 PM	BCl3 MFC set to  0.000000
9/4/2012	5:39:40 PM	PH3 MFC set to  0.000000
9/4/2012	5:39:40 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:39:40 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:39:40 PM	Tube furnace set to 0
9/4/2012	5:40:10 PM	Helium valve closed
9/4/2012	5:40:10 PM	H2 valve closed
9/4/2012	5:40:10 PM	BCl3 valve closed
9/4/2012	5:40:10 PM	PH3 valve closed
9/4/2012	5:40:10 PM	SiCl4 pre valve closed
9/4/2012	5:40:10 PM	SiCl4 post valve closed
9/4/2012	5:40:10 PM	Bypass valve closed
9/4/2012	5:40:10 PM	Bubbler valve closed
9/4/2012	5:40:10 PM	Main Vac valve opened
9/4/2012	5:40:10 PM	Helium MFC set to  0.000000
9/4/2012	5:40:10 PM	H2 MFC set to  0.000000
9/4/2012	5:40:10 PM	BCl3 MFC set to  0.000000
9/4/2012	5:40:10 PM	PH3 MFC set to  0.000000
9/4/2012	5:40:10 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:40:10 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:40:10 PM	Tube furnace set to 0
9/4/2012	5:40:40 PM	H2 valve closed
9/4/2012	5:40:40 PM	BCl3 valve closed
9/4/2012	5:40:40 PM	PH3 valve closed
9/4/2012	5:40:40 PM	SiCl4 pre valve closed
9/4/2012	5:40:40 PM	SiCl4 post valve closed
9/4/2012	5:40:40 PM	Bypass valve closed
9/4/2012	5:40:40 PM	Bubbler valve closed
9/4/2012	5:40:40 PM	Helium valve opened
9/4/2012	5:40:40 PM	Main Vac valve opened
9/4/2012	5:40:40 PM	Helium MFC set to  20.000000
9/4/2012	5:40:40 PM	H2 MFC set to  0.000000
9/4/2012	5:40:40 PM	BCl3 MFC set to  0.000000
9/4/2012	5:40:40 PM	PH3 MFC set to  0.000000
9/4/2012	5:40:40 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:40:40 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:40:41 PM	Tube furnace set to 0
9/4/2012	5:41:11 PM	Helium valve closed
9/4/2012	5:41:11 PM	H2 valve closed
9/4/2012	5:41:11 PM	BCl3 valve closed
9/4/2012	5:41:11 PM	PH3 valve closed
9/4/2012	5:41:11 PM	SiCl4 pre valve closed
9/4/2012	5:41:11 PM	SiCl4 post valve closed
9/4/2012	5:41:11 PM	Bypass valve closed
9/4/2012	5:41:11 PM	Bubbler valve closed
9/4/2012	5:41:11 PM	Main Vac valve opened
9/4/2012	5:41:11 PM	Helium MFC set to  0.000000
9/4/2012	5:41:11 PM	H2 MFC set to  0.000000
9/4/2012	5:41:11 PM	BCl3 MFC set to  0.000000
9/4/2012	5:41:11 PM	PH3 MFC set to  0.000000
9/4/2012	5:41:11 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:41:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:41:11 PM	Tube furnace set to 0
9/4/2012	5:41:41 PM	H2 valve closed
9/4/2012	5:41:41 PM	BCl3 valve closed
9/4/2012	5:41:41 PM	PH3 valve closed
9/4/2012	5:41:41 PM	SiCl4 pre valve closed
9/4/2012	5:41:41 PM	SiCl4 post valve closed
9/4/2012	5:41:41 PM	Bypass valve closed
9/4/2012	5:41:41 PM	Bubbler valve closed
9/4/2012	5:41:41 PM	Helium valve opened
9/4/2012	5:41:41 PM	Main Vac valve opened
9/4/2012	5:41:41 PM	Helium MFC set to  20.000000
9/4/2012	5:41:41 PM	H2 MFC set to  0.000000
9/4/2012	5:41:41 PM	BCl3 MFC set to  0.000000
9/4/2012	5:41:41 PM	PH3 MFC set to  0.000000
9/4/2012	5:41:41 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:41:41 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:41:41 PM	Tube furnace set to 0
9/4/2012	5:42:11 PM	Helium valve closed
9/4/2012	5:42:11 PM	H2 valve closed
9/4/2012	5:42:11 PM	BCl3 valve closed
9/4/2012	5:42:11 PM	PH3 valve closed
9/4/2012	5:42:11 PM	SiCl4 pre valve closed
9/4/2012	5:42:11 PM	SiCl4 post valve closed
9/4/2012	5:42:11 PM	Bypass valve closed
9/4/2012	5:42:11 PM	Bubbler valve closed
9/4/2012	5:42:11 PM	Main Vac valve opened
9/4/2012	5:42:11 PM	Helium MFC set to  0.000000
9/4/2012	5:42:11 PM	H2 MFC set to  0.000000
9/4/2012	5:42:11 PM	BCl3 MFC set to  0.000000
9/4/2012	5:42:11 PM	PH3 MFC set to  0.000000
9/4/2012	5:42:11 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:42:11 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:42:11 PM	Tube furnace set to 0
9/4/2012	5:42:41 PM	H2 valve closed
9/4/2012	5:42:41 PM	BCl3 valve closed
9/4/2012	5:42:41 PM	PH3 valve closed
9/4/2012	5:42:41 PM	SiCl4 pre valve closed
9/4/2012	5:42:41 PM	SiCl4 post valve closed
9/4/2012	5:42:41 PM	Bypass valve closed
9/4/2012	5:42:41 PM	Bubbler valve closed
9/4/2012	5:42:41 PM	Helium valve opened
9/4/2012	5:42:41 PM	Main Vac valve opened
9/4/2012	5:42:41 PM	Helium MFC set to  20.000000
9/4/2012	5:42:41 PM	H2 MFC set to  0.000000
9/4/2012	5:42:41 PM	BCl3 MFC set to  0.000000
9/4/2012	5:42:41 PM	PH3 MFC set to  0.000000
9/4/2012	5:42:41 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:42:41 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:42:42 PM	Tube furnace set to 0
9/4/2012	5:43:12 PM	Helium valve closed
9/4/2012	5:43:12 PM	H2 valve closed
9/4/2012	5:43:12 PM	BCl3 valve closed
9/4/2012	5:43:12 PM	PH3 valve closed
9/4/2012	5:43:12 PM	SiCl4 pre valve closed
9/4/2012	5:43:12 PM	SiCl4 post valve closed
9/4/2012	5:43:12 PM	Bypass valve closed
9/4/2012	5:43:12 PM	Bubbler valve closed
9/4/2012	5:43:12 PM	Main Vac valve opened
9/4/2012	5:43:12 PM	Helium MFC set to  0.000000
9/4/2012	5:43:12 PM	H2 MFC set to  0.000000
9/4/2012	5:43:12 PM	BCl3 MFC set to  0.000000
9/4/2012	5:43:12 PM	PH3 MFC set to  0.000000
9/4/2012	5:43:12 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:43:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:43:12 PM	Tube furnace set to 0
9/4/2012	5:43:42 PM	H2 valve closed
9/4/2012	5:43:42 PM	BCl3 valve closed
9/4/2012	5:43:42 PM	PH3 valve closed
9/4/2012	5:43:42 PM	SiCl4 pre valve closed
9/4/2012	5:43:42 PM	SiCl4 post valve closed
9/4/2012	5:43:42 PM	Bypass valve closed
9/4/2012	5:43:42 PM	Bubbler valve closed
9/4/2012	5:43:42 PM	Helium valve opened
9/4/2012	5:43:42 PM	Main Vac valve opened
9/4/2012	5:43:42 PM	Helium MFC set to  20.000000
9/4/2012	5:43:42 PM	H2 MFC set to  0.000000
9/4/2012	5:43:42 PM	BCl3 MFC set to  0.000000
9/4/2012	5:43:42 PM	PH3 MFC set to  0.000000
9/4/2012	5:43:42 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:43:42 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:43:42 PM	Tube furnace set to 0
9/4/2012	5:44:12 PM	Helium valve closed
9/4/2012	5:44:12 PM	H2 valve closed
9/4/2012	5:44:12 PM	BCl3 valve closed
9/4/2012	5:44:12 PM	PH3 valve closed
9/4/2012	5:44:12 PM	SiCl4 pre valve closed
9/4/2012	5:44:12 PM	SiCl4 post valve closed
9/4/2012	5:44:12 PM	Bypass valve closed
9/4/2012	5:44:12 PM	Bubbler valve closed
9/4/2012	5:44:12 PM	Main Vac valve opened
9/4/2012	5:44:12 PM	Helium MFC set to  0.000000
9/4/2012	5:44:12 PM	H2 MFC set to  0.000000
9/4/2012	5:44:12 PM	BCl3 MFC set to  0.000000
9/4/2012	5:44:12 PM	PH3 MFC set to  0.000000
9/4/2012	5:44:12 PM	SiCl4 MFC set to  0.000000
9/4/2012	5:44:12 PM	Bypass solenoid MFC set to  0.000000
9/4/2012	5:44:12 PM	Tube furnace set to 0
9/4/2012	5:44:13 PM	Run finished at 5:44 PM
9/4/2012	5:44:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
